{"id":"W2070796872","doi":"10.1002/cvde.200706642","title":"Characterization of SiO<sub>2</sub> Deposited by CVD on Mo<sub><i>x</i></sub>O<sub><i>y</i></sub>/Al<sub>2</sub>O<sub>3</sub> using NMR and TOF‐SIMS","year":2008,"lang":"en","type":"article","venue":"Chemical Vapor Deposition","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Imperial Oil (Canada); University of Calgary","funders":"","keywords":"Physisorption; Analytical Chemistry (journal); Secondary ion mass spectrometry; Chemistry; Mass spectrometry; Stoichiometry; Monolayer; Deposition (geology); Inductively coupled plasma; Ion; Physical chemistry; Plasma; Adsorption; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":["metaepi_narrow"],"category_scores_codex":[0.0003948416,0.001613292,0.001685715,0.0008885168,0.0008089682,0.0003412701,0.0005359614,0.001231113,0.00001851791],"category_scores_gemma":[0.0001656759,0.001836405,0.0008677199,0.001997548,0.0004191445,0.001551834,0.0002623244,0.001544237,0.0001698784],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009329795,"about_ca_system_score_gemma":0.0001159576,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000497507,"about_ca_topic_score_gemma":0.00003829046,"domain_scores_codex":[0.9925309,0.0002542744,0.002317578,0.001843368,0.00140828,0.001645579],"domain_scores_gemma":[0.9961066,0.0003553805,0.000967743,0.001096289,0.0006490871,0.0008249491],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003209137,0.0007000263,0.0003586031,0.0004261232,0.0005206866,0.0001344023,0.0003634981,0.003388812,0.9818875,0.0000100849,0.001143204,0.01074619],"study_design_scores_gemma":[0.001632653,0.0002301229,0.001563773,0.0009109635,0.0007021933,0.0004786514,0.00008785344,0.04427113,0.9482155,0.00004930405,0.00007917961,0.001778613],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9837226,0.0004434913,0.01248953,0.0002206556,0.0007107429,0.000978452,0.0004507274,0.0008372627,0.0001465355],"genre_scores_gemma":[0.9919367,0.002788627,0.0003865863,0.0005221569,0.0006346007,0.0001788086,0.003111257,0.000437313,0.000003934202],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04088232,"threshold_uncertainty_score":0.9996614,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007879439357285809,"score_gpt":0.1949503440296298,"score_spread":0.187070904672344,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}