{"id":"W2072023779","doi":"10.1007/s12540-011-0817-5","title":"New process of electroplate Sn bumping on TSV without a PR mould for 3D-chip stacking","year":2011,"lang":"en","type":"article","venue":"Metals and Materials International","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Bumping; Electroplating; Materials science; Plating (geology); Anode; Metallurgy; Stacking; Current density; Composite material; Deposition (geology); Alloy; Photoresist; Electrode; Layer (electronics); Mechanical engineering; Nuclear magnetic resonance","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001191925,0.0001036884,0.0001745972,0.00008097664,0.00001960728,0.0000271507,0.0001219561,0.00005836608,0.0001049014],"category_scores_gemma":[0.00005538802,0.00008742742,0.00002319077,0.00002728847,0.00001842927,0.0001019352,0.00002388519,0.00003743243,0.000002646164],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001202881,"about_ca_system_score_gemma":0.00000972926,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002001541,"about_ca_topic_score_gemma":0.000002035447,"domain_scores_codex":[0.9994597,0.000005310442,0.0002021795,0.0001131686,0.00009539849,0.0001241969],"domain_scores_gemma":[0.999786,0.00001800888,0.00006052771,0.00007104211,0.00004500376,0.00001938545],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0005919242,0.00008892627,0.0003518097,0.0005619337,0.0008959522,0.000006821242,0.001722361,0.0003637654,0.8345375,0.1271802,0.0005608544,0.03313798],"study_design_scores_gemma":[0.0003907591,0.0001001342,0.0003407802,0.00008218221,0.0000272794,0.000007941282,0.0000571149,0.0006550524,0.9874696,0.009052671,0.001690019,0.000126509],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9440193,0.0001450226,0.05095584,0.00004124802,0.0005850826,0.0002102454,0.00005052377,0.0001867306,0.003806016],"genre_scores_gemma":[0.9813169,0.00007750317,0.01831254,0.00002484888,0.00007601044,0.00002970195,0.00001050731,0.00001868249,0.0001333636],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.152932,"threshold_uncertainty_score":0.3565187,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02851047514469626,"score_gpt":0.2578573078904529,"score_spread":0.2293468327457566,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}