{"id":"W2073467466","doi":"10.1109/jmems.2007.904349","title":"Modeling of Wet Stiction in Microelectromechanical Systems (MEMS)","year":2007,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Adhesion, Friction, and Surface Interactions","field":"Engineering","cited_by":34,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Stiction; Asperity (geotechnical engineering); Microelectromechanical systems; Adhesion; Capillary action; Work (physics); Deformation (meteorology); Mechanics; Materials science; Mechanical engineering; Nanotechnology; Composite material; Physics; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002367206,0.0004026877,0.0006402389,0.0003781855,0.0004040271,0.0006519738,0.0007848245,0.001669017,0.001446399],"category_scores_gemma":[0.0005664774,0.0003706259,0.0007376662,0.000299889,0.0005250738,0.0007335089,0.0005860989,0.0005063784,0.0003960004],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005624357,"about_ca_system_score_gemma":0.0007081338,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004905773,"about_ca_topic_score_gemma":0.002959992,"domain_scores_codex":[0.9998214,0.00003236837,0.000008456237,0.00002829246,0.00008529597,0.0000242295],"domain_scores_gemma":[0.9998525,0.00006225613,0.00002483319,0.00001361509,0.00003539769,0.00001142041],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000009475706,0.00001647455,0.0002950699,0.00005711362,0.00001364967,0.0001556896,0.00005902604,0.9779096,0.007509495,0.007020943,0.0005217805,0.006431747],"study_design_scores_gemma":[0.000001081576,0.000006085548,0.00007357186,0.000001965802,0.000001423878,0.00001376982,0.000003006569,0.9985384,0.0003998583,0.0005798633,0.0003789631,0.000002053564],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.07029662,0.001823399,0.9059035,0.000479525,0.0001380725,0.000121356,0.0002425583,0.0005744189,0.02042053],"genre_scores_gemma":[0.9327871,0.002038241,0.04654962,0.0001380928,0.00008888839,0.0002764705,0.000278299,0.0001457441,0.01769767],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004905773,"threshold_uncertainty_score":0.009754419,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01058112939704153,"score_gpt":0.2289684304072124,"score_spread":0.2183873010101709,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}