{"id":"W2073553220","doi":"10.1016/j.talanta.2010.05.001","title":"Hybrid plasma bonding for void-free strong bonded interface of silicon/glass at 200°C","year":2010,"lang":"en","type":"article","venue":"Talanta","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":42,"is_retracted":false,"has_abstract":false,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; McMaster University","keywords":"Anodic bonding; Void (composites); Silicon; Plasma activation; Chemistry; Anode; Amorphous silicon; Amorphous solid; Reactive-ion etching; Plasma; Chemical engineering; Etching (microfabrication); Composite material; Layer (electronics); Crystalline silicon; Materials science; Crystallography; Physical chemistry; Electrode; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007034334,0.0001454542,0.0002033269,0.00007893911,0.00004036641,0.00001292422,0.0003659074,0.00009880067,0.00006826794],"category_scores_gemma":[0.000086644,0.0001397629,0.00006373692,0.00005134375,0.00007297096,0.00008571341,0.0001674608,0.0002018362,0.00002890632],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003470206,"about_ca_system_score_gemma":0.000007822905,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001272455,"about_ca_topic_score_gemma":0.000115962,"domain_scores_codex":[0.9992945,0.000002633421,0.0001932326,0.0001474796,0.00008636703,0.0002757635],"domain_scores_gemma":[0.999386,0.00007881655,0.00004335348,0.000435084,0.00001887692,0.0000379405],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004462367,0.00002773229,0.002908288,0.0002065497,0.00009287442,0.00000686865,0.0001472486,0.0005400363,0.9320192,0.005437362,0.0546662,0.003903048],"study_design_scores_gemma":[0.0007169315,0.00005452635,0.0003639419,0.00002934227,0.00002024015,0.0000317778,0.0001646722,0.01592311,0.9652214,0.0007454574,0.01653238,0.0001962103],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9934761,0.00009834825,0.0008335038,0.00008095871,0.0004799773,0.0001823723,0.0001351726,0.0005300439,0.004183511],"genre_scores_gemma":[0.9979836,0.00001081071,0.0006546486,0.000003458082,0.00004731329,0.00002150884,0.00001406409,0.00003331696,0.00123129],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03813382,"threshold_uncertainty_score":0.5699364,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01051066360440148,"score_gpt":0.232595561959583,"score_spread":0.2220848983551815,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}