{"id":"W2073646407","doi":"10.1149/04901.0475ecst","title":"Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current","year":2012,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Electron and X-Ray Spectroscopy Techniques","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Electron beam-induced current; Doping; Materials science; Optoelectronics; Compensation (psychology); Transistor; Current (fluid); Electron; Charge (physics); Voltage; Electrical engineering; Physics; Silicon; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003150819,0.0001795193,0.0001800883,0.0002330994,0.0002931399,0.00007024541,0.0001517983,0.00005785891,0.0005336232],"category_scores_gemma":[0.000007486086,0.0001829294,0.0000726334,0.000438876,0.00004609871,0.000835949,0.000006193087,0.0003714369,0.000059411],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002822333,"about_ca_system_score_gemma":0.0001054675,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003622292,"about_ca_topic_score_gemma":0.0003909293,"domain_scores_codex":[0.9985343,0.00007017099,0.0002713225,0.0002477931,0.0001840456,0.000692331],"domain_scores_gemma":[0.999541,0.00003541402,0.00005322455,0.0002117981,0.00004043687,0.0001180824],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001010929,0.0002528605,0.002742718,0.0000109407,0.000003921319,4.530619e-7,0.0003096667,0.00007238069,0.9955531,0.0002341787,0.00004119628,0.0007684969],"study_design_scores_gemma":[0.0001900288,0.00004187735,0.003166403,0.00003730345,0.00003992112,0.00002341666,0.0001111773,0.0003840204,0.9914725,0.0001205708,0.004173767,0.0002390249],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9404529,0.001147183,0.05641144,0.0001592871,0.0007105236,0.0002514467,0.000008875772,0.0003130441,0.0005453486],"genre_scores_gemma":[0.9975763,0.00006638675,0.002025276,0.00006270291,0.0001416489,0.00006560899,0.00000441224,0.0000265439,0.00003110075],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05712347,"threshold_uncertainty_score":0.7459643,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02705343920869101,"score_gpt":0.3185131117414414,"score_spread":0.2914596725327504,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}