{"id":"W2073779469","doi":"10.1557/opl.2013.425","title":"GISAXS study on the annealing behavior of sputtered HfO<sub>2</sub> thin films","year":2013,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Manitoba","funders":"Laboratório Nacional de Luz Síncrotron","keywords":"Grazing-incidence small-angle scattering; Materials science; Thin film; Scattering; Sputter deposition; Annealing (glass); Sputtering; Analytical Chemistry (journal); Optics; Nanotechnology; Small-angle neutron scattering; Composite material; Neutron scattering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005410341,0.0002011288,0.0002337548,0.0002606343,0.0003125768,0.0001676089,0.0001800824,0.0002359744,0.003240722],"category_scores_gemma":[0.0001146191,0.0001198173,0.000175706,0.0003111903,0.0002002302,0.0002092619,0.00009710003,0.0002012086,0.0002210293],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002620179,"about_ca_system_score_gemma":0.00009483003,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00244641,"about_ca_topic_score_gemma":0.002467572,"domain_scores_codex":[0.9999681,0.000002664776,0.000001011895,0.000009021236,0.00001134462,0.000007988462],"domain_scores_gemma":[0.9999424,0.00001632012,0.00001387405,0.000004694031,0.00001925368,0.000003418427],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003875373,0.00002385683,0.003005387,0.0001492033,0.00002146276,0.0003361448,0.0002599588,0.0007063171,0.9915391,0.0005212001,0.0003821022,0.002667642],"study_design_scores_gemma":[0.00004397716,0.0006322999,0.126782,0.00004685865,0.00007591032,0.0007204238,0.0009730203,0.01222984,0.8491256,0.0003621137,0.008983956,0.00002409069],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9963928,0.0005195889,0.0003750406,0.00005210365,0.000009261233,0.000004407452,0.0002495427,0.00004593639,0.002351318],"genre_scores_gemma":[0.9980255,0.0001818102,0.00036779,0.00001552674,0.000006480438,0.000005519675,0.0002362077,0.00001591049,0.001145198],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003240722,"threshold_uncertainty_score":0.01084131,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02045752113931317,"score_gpt":0.2176069169239401,"score_spread":0.1971493957846269,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}