{"id":"W2073893829","doi":"10.1063/1.3081042","title":"Formation of high density tungsten nanodots embedded in silicon nitride for nonvolatile memory application","year":2009,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Nanodot; Materials science; Optoelectronics; Tungsten; Nitride; Silicon; Non-volatile memory; Silicon nitride; Sputtering; Nanotechnology; Thin film; Metallurgy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007532875,0.0001219105,0.0002052545,0.00004384717,0.00002054394,0.00001769362,0.00009123568,0.00004906557,0.000002265028],"category_scores_gemma":[0.000002007223,0.0001323951,0.00003603534,0.0001090963,0.00001190581,0.000197716,0.000007354261,0.00004955695,0.000007576171],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004229141,"about_ca_system_score_gemma":0.000003861518,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003254033,"about_ca_topic_score_gemma":0.00000471651,"domain_scores_codex":[0.9993805,0.000005658523,0.0002431531,0.0001269058,0.00009016022,0.0001536114],"domain_scores_gemma":[0.9996591,0.00003914841,0.00007919833,0.000179787,0.00002040146,0.00002232509],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002138789,0.0000161663,0.00001242061,0.00008674273,0.000006142168,1.001856e-7,0.0003114904,0.01039268,0.9840733,0.0007078219,0.0002727935,0.004098987],"study_design_scores_gemma":[0.0004975467,0.000009248456,0.001614284,0.00001233363,0.0000129673,3.198634e-7,0.00005764563,0.00578148,0.990182,0.00165824,0.00002865769,0.0001452729],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.988203,0.00001091269,0.01087732,0.00004331606,0.00008103676,0.0004648362,0.00001055802,0.00008679874,0.0002221981],"genre_scores_gemma":[0.9985495,0.000002367968,0.0007129901,0.0004237006,0.0001267422,0.00006320969,0.000103743,0.00001706442,7.466314e-7],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01034641,"threshold_uncertainty_score":0.5398917,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00793187005086748,"score_gpt":0.1993993889569922,"score_spread":0.1914675189061247,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}