{"id":"W2073893829","doi":"10.1063/1.3081042","title":"Formation of high density tungsten nanodots embedded in silicon nitride for nonvolatile memory application","year":2009,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Nanodot; Materials science; Optoelectronics; Tungsten; Nitride; Silicon; Non-volatile memory; Silicon nitride; Sputtering; Nanotechnology; Thin film; Metallurgy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006786014,0.0001400907,0.0001264044,0.0001116782,0.0001110305,0.0001781537,0.0002695054,0.0001697079,0.0003102139],"category_scores_gemma":[0.00009592634,0.0001392449,0.000114469,0.00006502401,0.0001118526,0.0002186574,0.0001839176,0.0001400314,0.0001073939],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001327214,"about_ca_system_score_gemma":0.00009424201,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002030483,"about_ca_topic_score_gemma":0.0007423529,"domain_scores_codex":[0.9999672,0.000002329554,0.000002403392,0.000007926584,0.0000140301,0.000006076706],"domain_scores_gemma":[0.9999447,0.00001029833,0.00001319509,0.000009403769,0.00001137943,0.00001099825],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009425401,0.000005927503,0.00009805125,0.00001836216,0.000002113851,0.00003360601,0.00001074985,0.00007639102,0.9986604,0.00008882421,0.00001566721,0.0009803424],"study_design_scores_gemma":[0.000003184994,0.00003934494,0.0004194483,7.938654e-7,0.000004219512,0.00006666822,0.000008037232,0.001840041,0.9970542,0.00002316274,0.0005388147,0.000001974999],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9903633,0.0005893263,0.00803667,0.00003765366,0.00002462241,0.00001568564,0.00004476296,0.00007671348,0.0008112101],"genre_scores_gemma":[0.989628,0.0003171143,0.00885418,0.00001343255,0.00000530755,0.00000888244,0.00005572302,0.00001112596,0.001106333],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0003102139,"threshold_uncertainty_score":0.001037776,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00793187005086748,"score_gpt":0.1993993889569922,"score_spread":0.1914675189061247,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}