{"id":"W2074317550","doi":"10.1088/0960-1317/20/6/065012","title":"Void nucleation at a sequentially plasma-activated silicon/silicon bonded interface","year":2010,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":28,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; McMaster University","keywords":"Nucleation; Materials science; Void (composites); Silicon; Reactive-ion etching; Wafer; Scanning electron microscope; Plasma etching; Annealing (glass); Transmission electron microscopy; Composite material; Plasma; Plasma activation; Analytical Chemistry (journal); Etching (microfabrication); Chemistry; Nanotechnology; Metallurgy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001121867,0.0002270739,0.0002864436,0.0002079715,0.0002061709,0.000232681,0.0003972508,0.0003112496,0.001395389],"category_scores_gemma":[0.0003025502,0.000361928,0.0002023431,0.0001143324,0.0002139071,0.0002327084,0.0002700553,0.0003575582,0.0001860155],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002903288,"about_ca_system_score_gemma":0.0002430099,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008626394,"about_ca_topic_score_gemma":0.001355444,"domain_scores_codex":[0.9998853,0.000006512631,0.000004804522,0.00003114425,0.00004616542,0.00002612145],"domain_scores_gemma":[0.999841,0.00005131712,0.00003191279,0.00002008151,0.00003557469,0.0000201955],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003455371,0.000009932344,0.0001410924,0.00002160797,0.000004275333,0.00006024435,0.00001825171,0.0001904286,0.9988195,0.00005368781,0.00001926953,0.0006271197],"study_design_scores_gemma":[0.000008567387,0.0001281606,0.002481857,0.000002651121,0.00001062118,0.00008642422,0.00002140813,0.002951047,0.9938626,0.00004900762,0.0003923867,0.000005355749],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9954972,0.0002640015,0.003079625,0.00001777914,0.00001464314,0.00001312255,0.00006468291,0.0000816176,0.0009672734],"genre_scores_gemma":[0.9942674,0.0001155588,0.004560902,0.00001212304,0.000004541811,0.0000189684,0.0001029686,0.00001910798,0.0008985524],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001395389,"threshold_uncertainty_score":0.004667997,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004634746040105577,"score_gpt":0.186123070192699,"score_spread":0.1814883241525934,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}