{"id":"W2074317550","doi":"10.1088/0960-1317/20/6/065012","title":"Void nucleation at a sequentially plasma-activated silicon/silicon bonded interface","year":2010,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":28,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; McMaster University","keywords":"Nucleation; Materials science; Void (composites); Silicon; Reactive-ion etching; Wafer; Scanning electron microscope; Plasma etching; Annealing (glass); Transmission electron microscopy; Composite material; Plasma; Plasma activation; Analytical Chemistry (journal); Etching (microfabrication); Chemistry; Nanotechnology; Metallurgy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001614805,0.0002219319,0.0002961409,0.0002483423,0.00005593582,0.00006018792,0.0002017881,0.0001984649,0.00004019772],"category_scores_gemma":[0.00004093196,0.0002148632,0.00009007601,0.0001357426,0.00002422787,0.0002123336,0.00009023312,0.0006001991,0.000008424298],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009123037,"about_ca_system_score_gemma":0.00001674289,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002546169,"about_ca_topic_score_gemma":0.00001197716,"domain_scores_codex":[0.9990863,0.000006008379,0.0004061741,0.0001289251,0.0001015453,0.0002710537],"domain_scores_gemma":[0.9995158,0.00002969102,0.0001219484,0.000160278,0.00007727414,0.00009502593],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001821325,0.00001246688,0.000007706796,0.00005721582,0.00008136634,0.00001679907,0.0001484758,0.001234787,0.9926478,0.0002040607,0.0003828032,0.005188304],"study_design_scores_gemma":[0.0005692685,0.00008295855,0.00004350418,0.00007577756,0.00003230188,0.0007997035,0.0001156952,0.01498221,0.9743319,0.0001081848,0.008649043,0.0002094455],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9916285,0.000712099,0.006261822,0.0000941015,0.0009544847,0.00008714241,0.000008277162,0.0002022532,0.00005135414],"genre_scores_gemma":[0.996315,0.0005027567,0.002985249,0.00001031273,0.00007138568,0.000001696195,0.000001926427,0.00005391614,0.00005775726],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0183159,"threshold_uncertainty_score":0.8761866,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004634746040105577,"score_gpt":0.186123070192699,"score_spread":0.1814883241525934,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}