{"id":"W2074319853","doi":"10.1117/12.647885","title":"Erbium doped silicon rich silicon oxide luminescent thin films deposited by ECR-PECVD","year":2005,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; McMaster University","keywords":"Plasma-enhanced chemical vapor deposition; Silicon; Nanoclusters; Materials science; Erbium; Photoluminescence; Luminescence; Analytical Chemistry (journal); Chemical vapor deposition; Silicon oxide; Dopant; Annealing (glass); Thin film; Doping; Optoelectronics; Nanotechnology; Chemistry; Silicon nitride","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007789324,0.000223292,0.0001612371,0.0001216866,0.00008516862,0.0002397884,0.0002665892,0.0001805105,0.001041039],"category_scores_gemma":[0.0001155312,0.000200669,0.000117686,0.0001734381,0.0001122509,0.0001536318,0.0001178754,0.0003092009,0.0003150318],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000208583,"about_ca_system_score_gemma":0.0001157188,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007761539,"about_ca_topic_score_gemma":0.001785359,"domain_scores_codex":[0.9999399,0.000002449882,0.000003535761,0.00001612,0.00002771703,0.00001013032],"domain_scores_gemma":[0.9999579,0.000009665971,0.00001116156,0.00000508573,0.00001273204,0.000003380907],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006184914,0.000002585053,0.0000579014,0.00001891947,0.000001721035,0.00001981019,0.000006475988,0.00005564639,0.9992015,0.00003470348,0.00001752928,0.0005770329],"study_design_scores_gemma":[0.000002774539,0.00002596278,0.0009084762,0.000002829548,0.000004054973,0.00004129852,0.000008679456,0.0005130334,0.9975283,0.000007134327,0.0009559061,0.000001735703],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9907775,0.0008091885,0.003822079,0.00003903582,0.0000224525,0.00001852343,0.0002384281,0.00008151279,0.004191237],"genre_scores_gemma":[0.9791731,0.001322043,0.01340659,0.00003382583,0.000006727398,0.00003210809,0.0003817618,0.00004809342,0.005595715],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001041039,"threshold_uncertainty_score":0.00348258,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007566727143735509,"score_gpt":0.2193587820044001,"score_spread":0.2117920548606645,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}