{"id":"W2074631937","doi":"10.1109/cjece.2006.259191","title":"Out-of-plane electrothermal actuators in silicon-on-insulator technology","year":2006,"lang":"en","type":"article","venue":"Canadian Journal of Electrical and Computer Engineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Silicon on insulator; Materials science; Actuator; Silicon; Plane (geometry); Optoelectronics; Engineering physics; Electrical engineering; Engineering; Geometry; Mathematics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001265406,0.0002452563,0.0002353691,0.0001091362,0.0003169671,0.0004785866,0.0002872148,0.000229575,0.0009344674],"category_scores_gemma":[0.0001664073,0.0002404926,0.0001459698,0.0001323694,0.0003009966,0.0005273278,0.000300774,0.0003280203,0.0003436866],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001785164,"about_ca_system_score_gemma":0.0001926598,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003369702,"about_ca_topic_score_gemma":0.001186367,"domain_scores_codex":[0.9999175,0.000007455026,0.000003793338,0.0000134097,0.00004385592,0.00001393836],"domain_scores_gemma":[0.9999046,0.00003115162,0.00002145461,0.00001087873,0.00002271572,0.000009105775],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001370364,0.00005064359,0.001010838,0.0001418778,0.00001805372,0.0003008598,0.0001862662,0.005778065,0.9644089,0.01493829,0.0008104366,0.01221876],"study_design_scores_gemma":[0.00002956379,0.0003457708,0.006445055,0.00003282343,0.0000495423,0.001130736,0.0002970268,0.09048305,0.8726796,0.006269887,0.02219791,0.00003911561],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.848128,0.003400264,0.09520951,0.0006356307,0.0004626641,0.00004184055,0.0001673763,0.0002940749,0.05166076],"genre_scores_gemma":[0.9797135,0.0008242967,0.01003305,0.0000446044,0.00005827322,0.0000132269,0.00007018328,0.00002396307,0.009218941],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009344674,"threshold_uncertainty_score":0.003126144,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002727427364216512,"score_gpt":0.1600115028243138,"score_spread":0.1572840754600972,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}