{"id":"W2074910360","doi":"10.1116/1.3478670","title":"Effect of process conditions on the microstructural formation of dc reactively sputter deposited AlN","year":2010,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Materials science; Microstructure; Sputter deposition; Cavity magnetron; Deposition (geology); Substrate (aquarium); Scanning electron microscope; Nitride; Thin film; Analytical Chemistry (journal); Sputtering; Chemical engineering; Composite material; Mineralogy; Nanotechnology; Layer (electronics); Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000662117,0.0001460897,0.0003302406,0.0003244657,0.0002077848,0.0000461451,0.0004376335,0.00008863653,0.00007902869],"category_scores_gemma":[0.00003089151,0.00008279752,0.00007863972,0.0005165648,0.0007112028,0.0004409118,0.00005281207,0.0003497493,0.000001223942],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000006911502,"about_ca_system_score_gemma":0.00007491434,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002179336,"about_ca_topic_score_gemma":0.000001872199,"domain_scores_codex":[0.9989545,0.0000366249,0.0004390598,0.0001437584,0.0002177219,0.0002083891],"domain_scores_gemma":[0.9984787,0.0001357237,0.0008478714,0.0001862147,0.0003023424,0.00004921006],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005047085,0.0000317723,0.01147449,0.00002818192,0.00002248492,7.478265e-7,0.0002206217,0.000009157696,0.9863487,0.001491156,0.00003924352,0.0002829216],"study_design_scores_gemma":[0.0004169754,0.0005971512,0.007431746,0.00007028278,0.00004344436,0.00004359263,0.0006344671,0.0001252529,0.9888779,0.001634503,0.00004155865,0.00008312805],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9987941,0.00003023593,0.00002416381,0.0005503008,0.0002685555,0.0001929078,0.00005702954,0.000008424091,0.00007423983],"genre_scores_gemma":[0.9997189,0.000004369947,0.0002088707,0.00002271953,0.00002484763,0.000004506493,0.000002611207,0.000006184375,0.00000698822],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004042745,"threshold_uncertainty_score":0.3376385,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005625809542565223,"score_gpt":0.2606787044976138,"score_spread":0.2550528949550486,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}