{"id":"W2074948757","doi":"10.1109/mikon.2006.4345126","title":"Radio Frequency MicroElectroMechanical Systems Components","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"","keywords":"Microelectromechanical systems; Radio frequency; Fabrication; Inductor; Electronic engineering; Electrical engineering; Materials science; Computer science; Optoelectronics; Engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001840766,0.0004639257,0.0003444374,0.0004672358,0.0003025191,0.0009294124,0.0005328442,0.0005878925,0.01628847],"category_scores_gemma":[0.0003881255,0.0001690396,0.0001598442,0.0004653346,0.0002489594,0.0005163316,0.000419809,0.0004042017,0.01107644],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004517695,"about_ca_system_score_gemma":0.0003300904,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000263553,"about_ca_topic_score_gemma":0.0004968901,"domain_scores_codex":[0.999721,0.00002089614,0.00001141268,0.00002784678,0.0001997929,0.00001912551],"domain_scores_gemma":[0.9998098,0.00003517489,0.00002002291,0.00002668047,0.00009770104,0.00001066913],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001026483,0.00004744805,0.0005271832,0.001477334,0.00004267835,0.0004371924,0.0001214098,0.001213677,0.169598,0.04569176,0.05878394,0.7219567],"study_design_scores_gemma":[0.00000603726,0.0001039984,0.0007606464,0.0001100825,0.00001662489,0.0008206188,0.00003115753,0.0008179193,0.02965031,0.003725213,0.9639465,0.0000110271],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.02431055,0.3822568,0.155193,0.003921724,0.01272514,0.000395592,0.0007613729,0.002575187,0.4178606],"genre_scores_gemma":[0.1769452,0.1645102,0.06480089,0.002246436,0.003095621,0.0003560277,0.0008332327,0.0002051956,0.5870072],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.01628847,"threshold_uncertainty_score":0.05449033,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006364971237909961,"score_gpt":0.1779905891245906,"score_spread":0.1716256178866806,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}