{"id":"W2076184141","doi":"10.1063/1.1356725","title":"Gadolinium silicate gate dielectric films with sub-1.5 nm equivalent oxide thickness","year":2001,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":92,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences","funders":"","keywords":"Materials science; Amorphous solid; Equivalent oxide thickness; X-ray photoelectron spectroscopy; Annealing (glass); Gate dielectric; Dielectric; Analytical Chemistry (journal); Transmission electron microscopy; Forming gas; Capacitance; Oxide; High-κ dielectric; Electron beam physical vapor deposition; Gate oxide; Chemical vapor deposition; Optoelectronics; Nuclear magnetic resonance; Nanotechnology; Composite material; Crystallography; Voltage; Metallurgy; Chemistry; Electrode; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007510712,0.0003339435,0.0002067418,0.0001364294,0.0001366896,0.0002475138,0.0002649283,0.000189631,0.0008380836],"category_scores_gemma":[0.00009382371,0.0002220957,0.0001296259,0.0001946336,0.0001223208,0.0001771068,0.0001352029,0.0002032292,0.0003728354],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002307125,"about_ca_system_score_gemma":0.0001811415,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006678597,"about_ca_topic_score_gemma":0.001433151,"domain_scores_codex":[0.9999619,0.000001550794,0.000003292092,0.000007242164,0.00001168988,0.00001431644],"domain_scores_gemma":[0.99992,0.00001482126,0.00002036581,0.00001151633,0.00002029404,0.00001296059],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000488586,0.000008008272,0.0001197253,0.0000270688,0.000003671608,0.00005430859,0.000008775098,0.00003737893,0.9992405,0.00006316492,0.00003951196,0.0003490635],"study_design_scores_gemma":[0.00002673234,0.0001441301,0.001609935,0.000002483059,0.00001328584,0.0001386007,0.00001471414,0.0004826469,0.9955639,0.0000348159,0.001966244,0.000002555533],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9951485,0.0003369948,0.00178976,0.00004877946,0.00002878007,0.00004364684,0.0005718854,0.00009091492,0.001940809],"genre_scores_gemma":[0.9872662,0.0008186428,0.006874796,0.00005036973,0.00001146288,0.00005170879,0.001054817,0.00005210332,0.003819848],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008380836,"threshold_uncertainty_score":0.002803624,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01262323172158615,"score_gpt":0.2004912181585149,"score_spread":0.1878679864369288,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}