{"id":"W2076761776","doi":"10.1116/1.4766318","title":"Study of the interaction of polymethylmethacrylate fragments with methyl isobutyl ketone and isopropyl alcohol","year":2012,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"","keywords":"Methyl isobutyl ketone; Isopropyl alcohol; Resist; Polymer; Solvent; Monomer; Dissolution; Radius of gyration; Materials science; Isopropyl; Polymer chemistry; Solubility; Chemical engineering; Chemistry; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001750872,0.000227355,0.000477465,0.001005035,0.0002114477,0.00002700787,0.0004018212,0.0001755967,0.00000194982],"category_scores_gemma":[0.00004724834,0.0001537402,0.00002043999,0.001050137,0.001058704,0.0004847278,0.0001780183,0.000392637,3.601972e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009684719,"about_ca_system_score_gemma":0.00008356719,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003481403,"about_ca_topic_score_gemma":0.000002888782,"domain_scores_codex":[0.9983696,0.00004517083,0.0006009535,0.0002061705,0.0003478799,0.0004302239],"domain_scores_gemma":[0.9987652,0.00001389528,0.0006577008,0.0002314808,0.0002856791,0.00004599575],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007997118,0.000165951,0.003839098,0.0001007904,0.000103142,6.054756e-7,0.0006773464,0.000003603419,0.9704968,0.0003032235,9.895957e-7,0.0242285],"study_design_scores_gemma":[0.0007611365,0.00108343,0.0006058156,0.0002130973,0.0001373268,0.0001754885,0.001375703,0.00001007875,0.9933756,0.002033161,0.00008069912,0.000148445],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9841573,0.0133419,0.001808395,0.00009868004,0.000163147,0.000352439,0.000002168597,0.00006432844,0.00001166534],"genre_scores_gemma":[0.9959028,0.0009914349,0.003045458,0.000008827654,0.00001372916,0.00001782002,9.443399e-8,0.00001830141,0.000001575869],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02408006,"threshold_uncertainty_score":0.6269342,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01546475467408814,"score_gpt":0.2542164476918637,"score_spread":0.2387516930177756,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}