{"id":"W2077155586","doi":"10.1021/nn4064659","title":"Electron Beam Lithography on Irregular Surfaces Using an Evaporated Resist","year":2014,"lang":"en","type":"article","venue":"ACS Nano","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":53,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Resist; Materials science; Nanolithography; Electron-beam lithography; Polystyrene; Lithography; Nanotechnology; Evaporation; Raman spectroscopy; Cantilever; Cathode ray; Optoelectronics; Optics; Electron; Polymer; Composite material; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001612843,0.0003729009,0.0002107106,0.0002062682,0.0001710725,0.0002850542,0.0002974589,0.0003145807,0.001808519],"category_scores_gemma":[0.0003078328,0.0002552706,0.0001722852,0.0001614491,0.0003522579,0.00026252,0.0004708199,0.0004597273,0.0009103983],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001679198,"about_ca_system_score_gemma":0.0001260245,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000231508,"about_ca_topic_score_gemma":0.0006473596,"domain_scores_codex":[0.9998016,0.00001622083,0.00001521101,0.00006392055,0.00006603571,0.00003696582],"domain_scores_gemma":[0.9997702,0.0000792672,0.00003700373,0.00008176017,0.00002013734,0.00001163817],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001031605,0.000005114692,0.0000903916,0.00004662716,0.00000373399,0.00008347158,0.00001770964,0.0001154259,0.997227,0.0002617105,0.00009051366,0.00204791],"study_design_scores_gemma":[0.00001108786,0.0000556024,0.001373006,0.00001079943,0.000005899479,0.000383952,0.00001824215,0.001689331,0.9910859,0.0001613451,0.005196728,0.000008080444],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8446261,0.001775352,0.1374292,0.0003008004,0.0002254992,0.0001468392,0.000707201,0.001151638,0.01363724],"genre_scores_gemma":[0.8533785,0.001519927,0.137541,0.0001157302,0.00002565505,0.00009922008,0.0004916716,0.000169492,0.006658673],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001808519,"threshold_uncertainty_score":0.00605011,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01171553719755518,"score_gpt":0.2379948768788868,"score_spread":0.2262793396813317,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}