{"id":"W2077759588","doi":"10.1016/j.mee.2009.04.001","title":"Microlens array fabrication by enhanced thermal reflow process: Towards efficient collection of fluorescence light from microarrays","year":2009,"lang":"en","type":"article","venue":"Microelectronic Engineering","topic":"Advanced optical system design","field":"Engineering","cited_by":107,"is_retracted":false,"has_abstract":false,"ca_institutions":"Wilfrid Laurier University; Université Laval; National Research Council Canada","funders":"","keywords":"Microlens; Materials science; Photoresist; Photomask; Resist; Polydimethylsiloxane; Lithography; Fabrication; Photolithography; Optoelectronics; Optics; Nanotechnology; Lens (geology); Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001003924,0.000352983,0.000391175,0.0001337818,0.00005446372,0.00002682118,0.000288804,0.0001668863,0.00001811147],"category_scores_gemma":[0.00004327055,0.000378611,0.00009634355,0.0005692305,0.00001805784,0.0001171508,0.000008639854,0.0003362762,0.00001861713],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005451703,"about_ca_system_score_gemma":0.00005014054,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001046129,"about_ca_topic_score_gemma":0.000002041567,"domain_scores_codex":[0.998221,0.0000207068,0.0004938669,0.0003832237,0.00022167,0.0006595606],"domain_scores_gemma":[0.9993439,0.00003714274,0.0000832746,0.0003259022,0.0001070841,0.000102721],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002004658,0.00004089356,0.000002551817,0.00005898819,0.00003592585,7.302828e-7,0.0003318169,0.1393788,0.8561547,0.00001406963,0.0001170858,0.003844365],"study_design_scores_gemma":[0.0003854111,0.0001050426,0.0001696299,0.0001275659,0.00002506002,0.000004809098,0.00001921977,0.03916577,0.9591872,0.00001966141,0.000438535,0.0003520925],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4102606,0.003876046,0.5840866,0.00006073035,0.0002181593,0.0004136546,0.00001548991,0.0005311397,0.0005376558],"genre_scores_gemma":[0.9904229,0.00009946604,0.009174779,0.00001111174,0.0001113033,0.00004232335,0.00003196345,0.00006645131,0.0000396958],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.5801623,"threshold_uncertainty_score":0.9998666,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002561383519617718,"score_gpt":0.1868544059741154,"score_spread":0.1842930224544977,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}