{"id":"W2077851897","doi":"10.1143/jjap.44.2294","title":"Effects of the Metallurgical Properties of Upper Cu Film on Stress-Induced Voiding (SIV) in Cu Dual-Damascene Interconnects","year":2005,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Natural Sciences and Engineering Research Council of Canada; Macquarie University","keywords":"Materials science; Void (composites); Annealing (glass); Copper; Vacancy defect; Stress (linguistics); Composite material; Copper interconnect; Metallurgy; Diffusion barrier; Crystallography; Chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006381416,0.000207129,0.0005799707,0.00007113936,0.00005991956,0.00002957023,0.0004607444,0.00007775328,0.0000448578],"category_scores_gemma":[0.0001835607,0.0001112144,0.0002351596,0.0002360771,0.0001577456,0.0002125983,0.0001381977,0.0003380546,0.00001067058],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008404998,"about_ca_system_score_gemma":0.00006740168,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004032243,"about_ca_topic_score_gemma":0.0000148665,"domain_scores_codex":[0.9981217,0.000139977,0.0007539467,0.0002141341,0.0005136285,0.0002566211],"domain_scores_gemma":[0.9985553,0.0003362954,0.0005375445,0.0003094306,0.0001849652,0.00007643981],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004655857,0.00067676,0.0001789829,0.000173189,0.00002995202,0.00000295304,0.006562098,0.007667212,0.9829284,0.0005957781,0.000008061926,0.0007110577],"study_design_scores_gemma":[0.001062229,0.0002227454,0.003241739,0.0004720001,0.00003391354,0.00000998406,0.001382915,0.0008565913,0.9922074,0.0003662912,0.00001411027,0.000130057],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9986525,0.0000387851,0.000008601269,0.0002253307,0.0002543463,0.0003070273,0.000002309057,0.000008223077,0.000502942],"genre_scores_gemma":[0.9995689,0.000007243392,0.00008607049,0.00009413159,0.0002056678,0.000009389585,2.072811e-7,0.00001616177,0.00001226555],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.009279054,"threshold_uncertainty_score":0.453519,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01487419903920698,"score_gpt":0.2346204475413552,"score_spread":0.2197462485021482,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}