{"id":"W2078572943","doi":"10.1116/1.2402153","title":"Low-stress silicon carbonitride for the machining of high-frequency nanomechanical resonators","year":2006,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"University of Alberta","keywords":"Materials science; Resonator; Silicon; X-ray photoelectron spectroscopy; Ultimate tensile strength; Composite material; Residual stress; Chemical vapor deposition; Annealing (glass); Young's modulus; Analytical Chemistry (journal); Optoelectronics; Nuclear magnetic resonance; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001195938,0.0002309526,0.0004246684,0.0004433319,0.0004800587,0.000117922,0.0005600495,0.0000888318,0.000008516945],"category_scores_gemma":[0.00005938894,0.0001438352,0.00009665206,0.0007607993,0.0005856723,0.0001765565,0.0001183485,0.000402669,5.427667e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007848835,"about_ca_system_score_gemma":0.0003823483,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000238645,"about_ca_topic_score_gemma":0.000004106271,"domain_scores_codex":[0.9979843,0.00002388156,0.0006351011,0.0003287164,0.0004956063,0.0005323255],"domain_scores_gemma":[0.9985803,0.00008804401,0.0005656189,0.0001750763,0.0004898853,0.00010101],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"theoretical_or_conceptual","study_design_scores_codex":[0.0001108673,0.000108633,0.003570831,0.00008551232,0.00008632204,9.054521e-7,0.00008373243,0.00001368803,0.6170143,0.2682756,0.000005476127,0.1106442],"study_design_scores_gemma":[0.001393511,0.0007981054,0.001820679,0.000157295,0.0001940973,0.00002127444,0.0002541689,0.0005617546,0.4736055,0.5205814,0.0002961766,0.0003160758],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9770353,0.01068142,0.01135213,0.0005124346,0.0001301906,0.0002137185,0.0000134419,0.00001048387,0.00005088406],"genre_scores_gemma":[0.9974315,0.00007056201,0.002311988,0.00002414153,0.000129947,0.000009684837,9.088489e-7,0.00001411691,0.000007113055],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2523058,"threshold_uncertainty_score":0.586543,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008074273116707139,"score_gpt":0.222799222133221,"score_spread":0.2147249490165139,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}