{"id":"W2078957978","doi":"10.1116/1.2348642","title":"Interface broadening due to ion mixing during thin film growth at the radio-frequency-biased electrode in a plasma-enhanced chemical vapor deposition environment","year":2006,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal; Regroupement Québécois sur les Matériaux de Pointe","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs","keywords":"Materials science; Ion; Ion beam mixing; Deposition (geology); Electrode; Analytical Chemistry (journal); Chemical vapor deposition; Thin film; Ion beam deposition; Atomic physics; Molecular physics; Ion beam; Optoelectronics; Nanotechnology; Chemistry; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000547622,0.0002558516,0.0003931255,0.0008288563,0.0003650182,0.0001136578,0.0005066512,0.0001759487,0.00004460358],"category_scores_gemma":[0.00004748973,0.0001974679,0.0001044114,0.001340238,0.0002475544,0.0005079887,0.0001477915,0.0006908257,0.00001019453],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004515738,"about_ca_system_score_gemma":0.00003863027,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00006559302,"about_ca_topic_score_gemma":0.00005650353,"domain_scores_codex":[0.9980326,0.00003042168,0.0006700231,0.0003440561,0.0003737414,0.0005491616],"domain_scores_gemma":[0.9992909,0.00007588259,0.0002346298,0.0002295868,0.00007585878,0.00009314664],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003518425,0.00003639435,0.001243704,0.0000127592,0.00002492359,0.00004128504,0.0002547489,0.08851748,0.909603,0.0000312353,0.00004971029,0.0001495619],"study_design_scores_gemma":[0.0004362543,0.0001126428,0.003112236,0.0001525496,0.00003611417,0.0006706049,0.000558186,0.05792696,0.9364536,0.000288567,0.00001982157,0.0002324331],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9918564,0.001031968,0.005419092,0.001209113,0.0001886732,0.0001436641,0.000004650684,0.00007224528,0.00007417146],"genre_scores_gemma":[0.9942337,0.0002113994,0.005410846,0.00001262944,0.00003477558,0.0000119004,0.000001231768,0.00002038245,0.00006311483],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03059051,"threshold_uncertainty_score":0.8052506,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002760748945272372,"score_gpt":0.1922107047205371,"score_spread":0.1894499557752647,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}