{"id":"W2079336984","doi":"10.1109/lascas.2013.6519037","title":"Capacitance measurements of an SOI based CMUT","year":2013,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"","keywords":"Capacitance; Silicon on insulator; Materials science; Wafer; Dielectric; Microelectromechanical systems; Differential capacitance; Optoelectronics; Electric field; Capacitive micromachined ultrasonic transducers; Oxide; Silicon; Electrode; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003007772,0.0004571347,0.0002897263,0.0005544424,0.0005930001,0.0004088877,0.0005690435,0.000635626,0.002128222],"category_scores_gemma":[0.001047797,0.000149774,0.0001585855,0.001106935,0.0003314827,0.0005165209,0.0003885964,0.0005023889,0.0002934243],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005363851,"about_ca_system_score_gemma":0.0003640361,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001112847,"about_ca_topic_score_gemma":0.001859818,"domain_scores_codex":[0.9994055,0.00004743276,0.00002030008,0.00008965928,0.0003433522,0.00009385662],"domain_scores_gemma":[0.9992355,0.0002340647,0.0001002966,0.00007458618,0.0002830264,0.00007251553],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001009716,0.00003015692,0.0005558578,0.00006352935,0.000009407093,0.0001866832,0.0001328975,0.0004797425,0.9919271,0.0002519204,0.0002722821,0.005989369],"study_design_scores_gemma":[0.00001110062,0.0005795992,0.008050284,0.00001494448,0.00001835696,0.0003833877,0.0001716539,0.007525038,0.9786341,0.0001126153,0.004471626,0.00002731235],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9872121,0.0003537733,0.00816961,0.0001563311,0.0001234299,0.00007528383,0.0006084999,0.0002812342,0.003019679],"genre_scores_gemma":[0.9912871,0.0002296949,0.006350365,0.00006467255,0.00001707829,0.00004962547,0.0001899225,0.00002768234,0.001783911],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002128222,"threshold_uncertainty_score":0.007119596,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02485597668389262,"score_gpt":0.215628120332535,"score_spread":0.1907721436486424,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}