{"id":"W2079442823","doi":"10.1016/s0921-5107(02)00323-9","title":"Photo-enhanced chemical wet etching of GaN","year":2002,"lang":"en","type":"article","venue":"Materials Science and Engineering B","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":38,"is_retracted":false,"has_abstract":false,"ca_institutions":"National Research Council Canada; Institute for Microstructural Sciences","funders":"Chung-Shan Institute of Science and Technology; National Science Council","keywords":"Etching (microfabrication); Isotropic etching; Materials science; Molar concentration; Molar ratio; Dry etching; Molar; Optoelectronics; Chemical engineering; Composite material; Nanotechnology; Analytical Chemistry (journal); Chemistry; Chromatography; Layer (electronics); Dentistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0002388234,0.0001011032,0.0001785665,0.00005589617,0.00004861459,0.00009810631,0.0001475954,0.00001926702,0.0009531357],"category_scores_gemma":[0.00001358005,0.00008943484,0.00001651262,0.0001267138,0.00007838728,0.0001824818,0.0000389421,0.0000300619,0.00001122987],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000008866618,"about_ca_system_score_gemma":0.00001118468,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007809365,"about_ca_topic_score_gemma":6.301794e-8,"domain_scores_codex":[0.9992713,0.000004842248,0.0001791474,0.0001766046,0.0001432901,0.0002247736],"domain_scores_gemma":[0.9996939,0.00001362302,0.00005303133,0.0001295501,0.00004160505,0.00006830237],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000001298887,0.0000108318,0.00003963873,0.00003054936,0.00000331723,1.816832e-7,0.0001974728,0.00003163363,0.9988021,0.0005864181,0.00002935569,0.0002672125],"study_design_scores_gemma":[0.0001211073,0.00001168314,0.0001810073,0.00003614067,0.000005316833,7.333211e-7,0.00004551366,0.0003631433,0.9988187,0.00005981325,0.000252147,0.0001046978],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9986321,0.00001660408,0.0001370307,0.00001765291,0.0003547841,0.00006377044,0.00002094951,0.00002559871,0.0007315113],"genre_scores_gemma":[0.9994574,0.000003043438,0.0003579457,0.00001603945,0.0001238195,0.000007523663,0.000002508619,0.000008676269,0.00002311],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009419058,"threshold_uncertainty_score":0.9999601,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01017251178978699,"score_gpt":0.2066963739142439,"score_spread":0.196523862124457,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}