{"id":"W2079935413","doi":"10.1117/1.3256006","title":"Novel approach for microassembly of three-dimensional rotary MOEMS mirrors","year":2009,"lang":"en","type":"article","venue":"Journal of Micro/Nanolithography MEMS and MOEMS","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Fastener; Process (computing); Surface micromachining; Mechanical engineering; Flexibility (engineering); Computer science; Displacement (psychology); Materials science; Engineering; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002832998,0.0002992278,0.0006070136,0.0005035351,0.00007731358,0.00002142088,0.0002607775,0.0002292194,0.000001850365],"category_scores_gemma":[0.00002084232,0.0002431951,0.0003924025,0.0003261849,0.0001333158,0.0002283305,0.00002842795,0.0003182513,1.795672e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000191966,"about_ca_system_score_gemma":0.00002554165,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001371245,"about_ca_topic_score_gemma":0.000006759879,"domain_scores_codex":[0.9984928,0.000003550737,0.0006980617,0.0002076436,0.0002051429,0.0003928312],"domain_scores_gemma":[0.9990959,0.00005324359,0.0003073529,0.000225357,0.0001947365,0.0001233873],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009862873,0.0002135341,0.0002432656,0.00009055451,0.0001540533,0.000005192063,0.00005781422,0.0006854863,0.9843308,0.0001461601,0.0007040354,0.01327041],"study_design_scores_gemma":[0.004202575,0.002087294,0.02939877,0.0003757831,0.0002395766,0.001082032,0.0002844639,0.001230955,0.9441972,0.005117793,0.01088286,0.0009006565],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.952925,0.01141453,0.03470219,0.00009382478,0.0003022995,0.0002985906,0.00005031425,0.00008358285,0.0001296267],"genre_scores_gemma":[0.7990106,0.0009974255,0.199739,0.00006157977,0.0001106815,0.000009296795,0.000007127117,0.00004172825,0.00002251532],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1650368,"threshold_uncertainty_score":0.9917207,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01891072684370095,"score_gpt":0.233765723885645,"score_spread":0.2148549970419441,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}