{"id":"W2080054179","doi":"10.1109/jsen.2012.2225043","title":"Strain Transfer Analysis of Surface-Bonded MEMS Strain Sensors","year":2012,"lang":"en","type":"article","venue":"IEEE Sensors Journal","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":32,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Finite element method; Strain gauge; Adhesive; Microelectromechanical systems; Trench; Sensitivity (control systems); Deep reactive-ion etching; Strain (injury); Layer (electronics); Etching (microfabrication); Composite material; Optoelectronics; Electronic engineering; Structural engineering; Reactive-ion etching; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003814416,0.0002532418,0.0005262604,0.0004310834,0.00007731278,0.0000240855,0.0001831191,0.0001997153,0.0001969554],"category_scores_gemma":[0.00002872522,0.0002253109,0.0003431056,0.0007704892,0.00009980001,0.0002778669,0.000007057427,0.000573985,0.00001023229],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007310754,"about_ca_system_score_gemma":0.00001300555,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000005817537,"about_ca_topic_score_gemma":0.00001928328,"domain_scores_codex":[0.9984233,0.00002203946,0.0005134699,0.0001307739,0.0003134504,0.0005969591],"domain_scores_gemma":[0.9993331,0.00008221478,0.00006482889,0.0002561608,0.00006986185,0.0001938054],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000880917,0.00003019711,0.0002756437,0.00001460419,0.0007847077,0.00001624419,0.0005113178,0.251189,0.7449642,0.00006635467,0.0001728439,0.001966063],"study_design_scores_gemma":[0.0009355326,0.0001002979,0.01251233,0.00005435159,0.001142812,0.0002214068,0.002707878,0.007743703,0.9699849,0.000419195,0.003405134,0.0007723955],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9939942,0.0005122821,0.003774411,0.00004900472,0.0005586519,0.00007991469,0.0001542641,0.0002422423,0.0006350089],"genre_scores_gemma":[0.9963517,0.0004988835,0.002814938,0.000009405198,0.0001496393,8.892308e-7,0.000004825618,0.00004360482,0.0001261587],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2434453,"threshold_uncertainty_score":0.9187912,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0201502258229045,"score_gpt":0.2504854679727846,"score_spread":0.2303352421498801,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}