{"id":"W2080655355","doi":"10.1109/mcas.2002.1045855","title":"Microelectromechanical systems and system-on-chip connectivity","year":2002,"lang":"en","type":"article","venue":"IEEE Circuits and Systems Magazine","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"CMC Microsystems","keywords":"Microelectromechanical systems; Modular design; Interconnection; Chip; Engineering; Die (integrated circuit); Electronic engineering; CMOS; Embedded system; Computer science; Electrical engineering; Computer hardware; Mechanical engineering; Telecommunications; Materials science; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001988033,0.0003109549,0.0005469919,0.0001516662,0.0001278604,0.0001262116,0.0001163984,0.0002258163,0.000003407081],"category_scores_gemma":[0.00002860262,0.0002718217,0.00003963727,0.0001706106,0.0000642474,0.0001279846,0.00002091825,0.0002877608,0.00006663654],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008961635,"about_ca_system_score_gemma":0.000003121293,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001588721,"about_ca_topic_score_gemma":0.00000527428,"domain_scores_codex":[0.9986182,0.00002519933,0.0003535922,0.0003896052,0.0001708425,0.0004425493],"domain_scores_gemma":[0.9992802,0.0001277746,0.00006597996,0.0003456533,0.00004141132,0.0001390334],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000008640469,0.00007597265,0.0001373105,0.003088128,0.0001938668,0.0001759453,0.0001938016,0.002733019,0.9441147,0.02427418,0.007817843,0.01718653],"study_design_scores_gemma":[0.00992824,0.003482195,0.004168706,0.006275055,0.0003860199,0.0110136,0.002936359,0.7453207,0.0583774,0.0007231002,0.1507813,0.006607363],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.969662,0.01510094,0.004228375,0.00003362881,0.00195504,0.000646756,0.00004350896,0.001495867,0.00683387],"genre_scores_gemma":[0.9982919,0.0007586503,0.00001211271,0.00001019831,0.0002210541,0.00008190974,0.000001472068,0.00005424236,0.0005685356],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.8857374,"threshold_uncertainty_score":0.9999734,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02168572437860906,"score_gpt":0.2084348170272064,"score_spread":0.1867490926485974,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}