{"id":"W2080753334","doi":"10.1063/1.2337260","title":"Dynamics of ion bombardment-induced modifications of Si(001) at the radio-frequency-biased electrode in low-pressure oxygen plasmas: <i>In situ</i> spectroscopic ellipsometry and Monte Carlo study","year":2006,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal; Regroupement Québécois sur les Matériaux de Pointe","funders":"","keywords":"Fluence; Materials science; Ion; Analytical Chemistry (journal); Plasma; Ion implantation; Penetration depth; Atomic physics; Electrode; Monte Carlo method; Ellipsometry; Substrate (aquarium); Molecular physics; Thin film; Optics; Nanotechnology; Chemistry; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001858788,0.000297523,0.0002626897,0.0002302146,0.0001595586,0.0003856467,0.0003412036,0.0003189052,0.001350409],"category_scores_gemma":[0.0004191202,0.0001676641,0.0001749556,0.0001741489,0.0002056424,0.0002591348,0.0001765982,0.0002494579,0.000292242],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004293059,"about_ca_system_score_gemma":0.0001127616,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001375749,"about_ca_topic_score_gemma":0.0007079432,"domain_scores_codex":[0.999894,0.000008752603,0.000002673408,0.00002732658,0.00004053153,0.0000267253],"domain_scores_gemma":[0.9997744,0.00009276236,0.00005487105,0.00001465962,0.0000425026,0.00002085409],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0002356837,0.00002710354,0.002624451,0.00006824683,0.00002007536,0.0001740593,0.0002151449,0.003199696,0.9897646,0.0002042585,0.00007798516,0.00338862],"study_design_scores_gemma":[0.00001920439,0.0002902647,0.02477799,0.000006503235,0.00002342336,0.000205325,0.0001243961,0.03335288,0.9399695,0.00009393098,0.001118518,0.00001803693],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.997895,0.0001739075,0.001229084,0.00001639332,0.000002491428,0.000007046701,0.00007878091,0.00004239399,0.0005549094],"genre_scores_gemma":[0.9985994,0.0001145198,0.0005019233,0.000007893421,0.00000207825,0.000008081672,0.0001401712,0.00001566845,0.0006103494],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001375749,"threshold_uncertainty_score":0.004517555,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005399635235606315,"score_gpt":0.2098695725654386,"score_spread":0.2044699373298323,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}