{"id":"W2081405646","doi":"10.1016/j.wear.2005.02.018","title":"Effects of K3[Fe(CN)6] slurry's pH value and applied potential on tungsten removal rate for chemical–mechanical planarization application","year":2005,"lang":"en","type":"article","venue":"Wear","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":12,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Chemical-mechanical planarization; Tungsten; Materials science; Slurry; X-ray photoelectron spectroscopy; Tribometer; Scanning electron microscope; Tribology; Corrosion; Tungsten carbide; Metallurgy; Chemical engineering; Composite material; Polishing","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004862131,0.0001303351,0.0002220414,0.00005452012,0.00007565581,0.00006007329,0.000168996,0.0001203789,0.00003068561],"category_scores_gemma":[0.00007981165,0.0001167195,0.0000409428,0.00007735746,0.00006695667,0.0000646397,0.00005949324,0.00005863401,0.00004844015],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003147334,"about_ca_system_score_gemma":0.00003754746,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001327093,"about_ca_topic_score_gemma":7.793942e-7,"domain_scores_codex":[0.998814,0.00006192479,0.000240141,0.0003600363,0.0002633995,0.0002604255],"domain_scores_gemma":[0.9994161,0.0001414708,0.00009972251,0.0002031799,0.00004518412,0.00009439191],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.002682981,0.0001264522,2.987392e-7,0.000159628,0.000006895509,0.00000103284,0.00003924892,0.0001037006,0.9878274,0.006784268,0.0001142412,0.002153875],"study_design_scores_gemma":[0.004599861,0.0001914937,0.00002169269,0.00002453853,0.00002477973,0.000001908073,0.00001153153,0.003758814,0.9895032,0.001091973,0.0006462408,0.0001239699],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9926115,0.00002362959,0.00561667,0.0002121602,0.0001240312,0.001060288,0.0000273786,0.00005469358,0.0002696194],"genre_scores_gemma":[0.9969231,0.00001235277,0.002263972,0.0001558954,0.0002935517,0.000221178,0.00004452022,0.00002345189,0.00006201043],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.005692294,"threshold_uncertainty_score":0.4759682,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004566074479572315,"score_gpt":0.2274343851980549,"score_spread":0.2228683107184826,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}