{"id":"W2081465478","doi":"10.1063/1.4751267","title":"Void evolution in silicon under inert and dry oxidizing ambient annealing and the role of a Si1−xGex epilayer cap","year":2012,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Void (composites); Annealing (glass); Silicon; Materials science; Oxidizing agent; Germanium; Analytical Chemistry (journal); Metallurgy; Crystallography; Composite material; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001431063,0.0002093475,0.0001648171,0.0001180598,0.0001112358,0.0002738488,0.0002577141,0.0002314884,0.0007489189],"category_scores_gemma":[0.0002045294,0.0001552864,0.0001269897,0.0001464218,0.0002137999,0.0001931844,0.0001241038,0.0001653345,0.0001037834],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000220065,"about_ca_system_score_gemma":0.0001057298,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009626931,"about_ca_topic_score_gemma":0.00143351,"domain_scores_codex":[0.9999163,0.000006904107,0.00000401987,0.00002791131,0.00002094859,0.00002383286],"domain_scores_gemma":[0.9998715,0.00003735537,0.00003281744,0.00001692672,0.00002347632,0.00001796914],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001161738,0.00001573843,0.0003217872,0.00004647502,0.000007644125,0.00005252185,0.00004574484,0.0002622156,0.9982918,0.00005619628,0.00002434976,0.0007594507],"study_design_scores_gemma":[0.000009740933,0.0003082149,0.009152684,0.000006045227,0.00001679315,0.00007623441,0.00006250344,0.003198514,0.9865393,0.00003050993,0.0005912966,0.000008068789],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9991034,0.0002455611,0.0002705325,0.000006188679,0.000005395437,0.000003381344,0.00007504442,0.00001955277,0.0002709144],"genre_scores_gemma":[0.9990527,0.0001384059,0.0003150319,0.000004289598,0.000002071497,0.000003809535,0.0001127117,0.000009001837,0.0003619545],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009626931,"threshold_uncertainty_score":0.002505422,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007706612260192113,"score_gpt":0.1983127856000348,"score_spread":0.1906061733398427,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}