{"id":"W2082175505","doi":"10.1557/proc-1074-i05-35","title":"High-mobility Nanocrystalline Indium Oxide TFTs with Silicon Nitride Gate Dielectric","year":2008,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Thin-film transistor; Optoelectronics; Plasma-enhanced chemical vapor deposition; Gate dielectric; Oxide thin-film transistor; Dielectric; Threshold voltage; Silicon nitride; Silicon oxide; Chemical vapor deposition; Nanocrystalline silicon; Nanocrystalline material; Silicon; Amorphous silicon; Transistor; Nanotechnology; Crystalline silicon; Electrical engineering; Voltage; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001296506,0.0001392425,0.0002959469,0.00009637442,0.0002046495,0.0002891065,0.000495837,0.0002372366,0.0007527682],"category_scores_gemma":[0.0003127276,0.000138303,0.00007810738,0.0001376994,0.000132315,0.0004815864,0.0001542602,0.0001785878,0.0002727183],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005976878,"about_ca_system_score_gemma":0.00024828,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002063312,"about_ca_topic_score_gemma":0.006283607,"domain_scores_codex":[0.9999238,0.000004287838,0.000004611762,0.00002043461,0.00002822308,0.00001858158],"domain_scores_gemma":[0.9998546,0.00003438894,0.00002523478,0.00002796025,0.0000350654,0.00002270163],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008693837,0.000006870073,0.0002592235,0.00002388324,0.000005130869,0.00008455738,0.00002669831,0.00008932258,0.9979349,0.0001720869,0.0002427211,0.001067636],"study_design_scores_gemma":[0.00003925443,0.0002013657,0.002737296,0.000007477206,0.00002419908,0.0003255736,0.00004799766,0.005411824,0.9885707,0.0001625593,0.0024631,0.00000864489],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9939678,0.0007176297,0.002574524,0.0001429829,0.00006515615,0.00001194332,0.0001399721,0.0001203883,0.002259622],"genre_scores_gemma":[0.9937336,0.0002930544,0.003737354,0.0000348635,0.00002432997,0.00001319452,0.0001262868,0.00002300242,0.002014357],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002063312,"threshold_uncertainty_score":0.004336536,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007202091540202441,"score_gpt":0.168732024353264,"score_spread":0.1615299328130615,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}