{"id":"W2082360686","doi":"10.1002/pssa.200790012","title":"Review Article: Hydrogen blistering of silicon: Progress in fundamental understanding","year":2007,"lang":"en","type":"article","venue":"physica status solidi (a)","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Microelectronics; Nanotechnology; Engineering physics; Silicon; Materials science; Silicon on insulator; Wafer; Telecommunications; Optoelectronics; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007588302,0.001253954,0.001586415,0.001235747,0.0004669408,0.001441006,0.001534328,0.002488947,0.006050197],"category_scores_gemma":[0.001151285,0.0002550446,0.0003028007,0.001853148,0.0008071247,0.00241163,0.0006319468,0.002149127,0.004333779],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007913369,"about_ca_system_score_gemma":0.000831716,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004592026,"about_ca_topic_score_gemma":0.0007340904,"domain_scores_codex":[0.999647,0.00004522197,0.00004181088,0.00009201645,0.0001343708,0.00003943525],"domain_scores_gemma":[0.9990988,0.0002953708,0.00008178392,0.00002170028,0.0003508432,0.0001514208],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0003019921,0.0000871549,0.000171141,0.01226274,0.00006181688,0.0007087045,0.0001184328,0.0003476187,0.005837895,0.003292093,0.6541486,0.3226617],"study_design_scores_gemma":[0.00002207639,0.0001157444,0.0003030481,0.0006557626,0.00003907135,0.001185604,0.0000748633,0.00009755238,0.001457936,0.001495757,0.994534,0.00001860554],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.0004773286,0.9590851,0.0003516955,0.006453857,0.03152869,0.00001426819,0.00006003575,0.0000234735,0.002005566],"genre_scores_gemma":[0.003475653,0.9381901,0.0003211626,0.005637798,0.04770614,0.00001309818,0.0001205257,0.00001348454,0.004522074],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.006050197,"threshold_uncertainty_score":0.02023995,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03300053291346072,"score_gpt":0.2761016435096857,"score_spread":0.243101110596225,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}