{"id":"W2082433925","doi":"10.1063/1.1322380","title":"Quantitative two-dimensional carrier profiling of a 400 nm complementary metal–oxide–semiconductor device by Schottky scanning capacitance microscopy","year":2000,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Manitoba","funders":"CMC Microsystems","keywords":"Materials science; Scanning capacitance microscopy; Semiconductor; Optoelectronics; Capacitance; Schottky diode; Transistor; Capacitor; Oxide; Semiconductor device; Schottky barrier; Analytical Chemistry (journal); Voltage; Nanotechnology; Chemistry; Diode; Scanning electron microscope; Electrode; Electrical engineering; Scanning confocal electron microscopy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001531864,0.0002292589,0.0001778714,0.0006574916,0.0002297565,0.000324932,0.0002299402,0.0003781515,0.001080368],"category_scores_gemma":[0.0003222125,0.0001608633,0.00008952562,0.0002914098,0.0003103681,0.0003796194,0.0002161482,0.0003117548,0.0001984796],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004822671,"about_ca_system_score_gemma":0.0002129164,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001146534,"about_ca_topic_score_gemma":0.00186738,"domain_scores_codex":[0.9999082,0.000007736043,0.000003888194,0.00001884884,0.00004727909,0.00001396046],"domain_scores_gemma":[0.9998178,0.00008640809,0.00002209866,0.00002288868,0.00003665311,0.00001420669],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001157669,0.000008410498,0.0001280943,0.00001532601,0.000001597879,0.00002209964,0.00001726935,0.0002297426,0.9973909,0.0001999254,0.00004499641,0.001930208],"study_design_scores_gemma":[0.000008093562,0.00005701692,0.004024897,0.00000371177,0.000006612745,0.000127351,0.00003898839,0.01884404,0.9751132,0.0002573176,0.001501513,0.00001726337],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9337434,0.0005419562,0.06177004,0.0001003514,0.00002582918,0.00005530051,0.0006466848,0.0005123349,0.002604111],"genre_scores_gemma":[0.9323844,0.0003820012,0.06480531,0.00004370488,0.00001076708,0.00008307203,0.0003019902,0.00004158788,0.001947106],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001146534,"threshold_uncertainty_score":0.003614187,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01919867593292182,"score_gpt":0.3122861357461394,"score_spread":0.2930874598132175,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}