{"id":"W2082512053","doi":"10.4028/www.scientific.net/jnanor.17.147","title":"Microstructural Investigation of SiO<sub>x</sub> Thin Films Grown by Reactive Sputtering on (001) Si Substrates","year":2012,"lang":"en","type":"article","venue":"Journal of nano research","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"University of Patras; Ryerson University","keywords":"Materials science; Amorphous solid; Photoluminescence; Sputtering; Annealing (glass); High-resolution transmission electron microscopy; Nanocrystal; Transmission electron microscopy; Thin film; Sputter deposition; Analytical Chemistry (journal); Lattice constant; Crystallography; Nanotechnology; Optoelectronics; Composite material; Optics; Diffraction","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002728356,0.0002523701,0.0004692247,0.0003769527,0.0002557475,0.0001860149,0.0007212582,0.0002039785,0.0003847133],"category_scores_gemma":[0.000674668,0.0001920921,0.0001395958,0.0005704,0.0005017761,0.0008995298,0.0001604061,0.0006484393,0.00004514598],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001530345,"about_ca_system_score_gemma":0.0002239576,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001220658,"about_ca_topic_score_gemma":0.00001400133,"domain_scores_codex":[0.9960308,0.0005069462,0.0008323576,0.0002960367,0.001531744,0.0008020851],"domain_scores_gemma":[0.9970415,0.000638624,0.0006815742,0.0003565291,0.0008751397,0.0004066832],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003900587,0.00005551947,0.003633858,0.00007279388,0.00001896828,0.00001549073,0.0008802054,0.00001145926,0.9863986,0.0000993117,0.00808558,0.0003380979],"study_design_scores_gemma":[0.0006085289,0.0004974552,0.02936681,0.0002186003,0.00001332953,0.0001894944,0.0001737878,0.0000335673,0.9678915,0.0003535925,0.0004658636,0.0001874656],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9976127,0.000786538,0.000001746076,0.0002895608,0.0008093051,0.0002559022,0.00007829812,0.00001303453,0.0001529246],"genre_scores_gemma":[0.9989341,0.0001460238,0.0003213084,0.00008191866,0.0003794312,0.000005122713,0.00001230688,0.0000302813,0.00008954467],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02573295,"threshold_uncertainty_score":0.783329,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03838326710882462,"score_gpt":0.3085642724010065,"score_spread":0.2701810052921819,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}