{"id":"W2083427815","doi":"10.1117/12.567458","title":"Silicon nanocrystal formation in silicon-rich silicon oxide thin films","year":2004,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Materials science; Nanocrystal; Silicon oxide; Silicon; Nucleation; Photoluminescence; Thin film; Plasma-enhanced chemical vapor deposition; Elastic recoil detection; Ellipsometry; Annealing (glass); Analytical Chemistry (journal); Amorphous solid; Optoelectronics; Nanotechnology; Composite material; Silicon nitride; Crystallography; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000693067,0.0004100801,0.0005259285,0.0001579023,0.0001100115,0.0001907456,0.001180863,0.0002843974,0.00004208495],"category_scores_gemma":[0.0006903766,0.0003462518,0.0004582747,0.000485425,0.0002727665,0.001204586,0.0002092724,0.0003517622,0.000005745799],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002618217,"about_ca_system_score_gemma":0.00006719876,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001112154,"about_ca_topic_score_gemma":0.000002781444,"domain_scores_codex":[0.9970284,3.854494e-8,0.001031931,0.0005318774,0.0008174081,0.0005903373],"domain_scores_gemma":[0.9981227,0.000141483,0.0005193895,0.00009846091,0.0009695138,0.0001484654],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00011764,0.0001099731,0.0004070194,0.0003915895,0.00004360811,3.218602e-7,0.0005355766,0.0007152167,0.8794939,0.1174629,0.0006737559,0.00004850674],"study_design_scores_gemma":[0.001541185,0.0002251256,0.00251594,0.0003521313,0.00004688678,0.00004737394,0.001480944,0.006744721,0.9846843,0.001660732,0.0003188779,0.000381823],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9966395,0.000121062,0.000006354608,0.001239424,0.0003623601,0.0007747393,0.00007358134,0.0001058846,0.0006770157],"genre_scores_gemma":[0.9861562,0.0000544766,0.01314017,0.0001764594,0.0001858358,0.0001457397,0.00001287741,0.00005138511,0.00007687018],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1158022,"threshold_uncertainty_score":0.999899,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009136592448695635,"score_gpt":0.2216845602240267,"score_spread":0.2125479677753311,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}