{"id":"W2084192785","doi":"10.1002/mop.20352","title":"High‐Q LIGA‐MEMS vertical cantilever variable capacitors for upper microwave frequencies","year":2004,"lang":"en","type":"article","venue":"Microwave and Optical Technology Letters","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Saskatchewan","funders":"","keywords":"LIGA; Microelectromechanical systems; Variable capacitor; Capacitor; Microwave; Capacitance; Cantilever; Materials science; Fabrication; Electrical engineering; Optoelectronics; Voltage; Engineering; Physics; Electrode; Composite material; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003550204,0.0002800657,0.0002471085,0.0001368644,0.0005252788,0.0005508137,0.0004679695,0.0003869149,0.005975456],"category_scores_gemma":[0.0007003626,0.0002667219,0.0002713996,0.000273263,0.0003121688,0.0005818789,0.0002266134,0.0003547457,0.0005393293],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007879685,"about_ca_system_score_gemma":0.0006518411,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002705941,"about_ca_topic_score_gemma":0.003845843,"domain_scores_codex":[0.9998932,0.00001376588,0.000002555408,0.00001019133,0.00004283193,0.00003754855],"domain_scores_gemma":[0.9996969,0.0001873745,0.00003472449,0.00002178988,0.00004305772,0.00001625393],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0006067251,0.00008017616,0.002239084,0.0002636297,0.00007683138,0.0005491586,0.0002466042,0.6133133,0.3439944,0.01674121,0.003200993,0.01868791],"study_design_scores_gemma":[0.0001832896,0.0003279415,0.002522004,0.00001869992,0.00005073862,0.0001671731,0.00008168172,0.8461605,0.1384182,0.003291808,0.008733714,0.0000442313],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7819421,0.0005994182,0.1883551,0.00072481,0.0000850138,0.00006450102,0.0003701141,0.0007400931,0.02711879],"genre_scores_gemma":[0.9893138,0.00006918843,0.008662653,0.00002795175,0.000005633094,0.00002424061,0.00005152402,0.00003914959,0.001805951],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.005975456,"threshold_uncertainty_score":0.01998991,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006656147851227358,"score_gpt":0.1942851384825852,"score_spread":0.1876289906313578,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}