{"id":"W2084328678","doi":"10.1117/12.474303","title":"A Low-voltage high-torque two-degree-of-freedom scanning micromirror for ECOM applications","year":2003,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Raster scan; Scanner; Microelectromechanical systems; Voltage; Optics; Actuator; Materials science; Digital micromirror device; Comb drive; Optoelectronics; Engineering; Physics; Electrical engineering; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000286622,0.0003416471,0.0003396248,0.0002676315,0.0002614813,0.0003366418,0.0009238669,0.0006584529,0.00125034],"category_scores_gemma":[0.0004030224,0.0003168478,0.0002198123,0.0001529119,0.0002215999,0.0005856379,0.0003667156,0.0003834557,0.0006285296],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000200098,"about_ca_system_score_gemma":0.0002701532,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001961596,"about_ca_topic_score_gemma":0.0005552528,"domain_scores_codex":[0.9997184,0.00002396117,0.00001925524,0.00004767876,0.0001662872,0.00002440498],"domain_scores_gemma":[0.9998153,0.00004588133,0.00003683892,0.00003392117,0.00003975916,0.00002834993],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000469375,0.00001011914,0.0001844662,0.0001045816,0.000003072287,0.0001307659,0.00002513622,0.0001582682,0.9768605,0.0009311742,0.0003643393,0.02118068],"study_design_scores_gemma":[0.0000651237,0.000743196,0.002718976,0.00002377544,0.00002380453,0.003358304,0.00003700769,0.01487746,0.9331085,0.0004810881,0.04451054,0.00005225356],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3705394,0.008857558,0.5954915,0.001148331,0.001118559,0.0003599196,0.0003440361,0.002796818,0.01934381],"genre_scores_gemma":[0.558435,0.001001959,0.432927,0.0002341403,0.0001487898,0.0001450034,0.0001278074,0.0001115547,0.006868863],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.00125034,"threshold_uncertainty_score":0.004182756,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01260899052171417,"score_gpt":0.2342307111916058,"score_spread":0.2216217206698916,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}