{"id":"W2085296895","doi":"10.1364/ao.51.007089","title":"Impact of LOCOS techniques on photonic wire waveguides","year":2012,"lang":"en","type":"article","venue":"Applied Optics","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs","keywords":"Bend radius; Materials science; LOCOS; Silicon nitride; Optics; Fabrication; Stack (abstract data type); Photonics; Optoelectronics; Masking (illustration); Silicon; Bending; Waveguide; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001030486,0.000161539,0.0002055493,0.00005284867,0.00002100465,0.00000981071,0.0001349597,0.0001087929,0.00007192278],"category_scores_gemma":[0.00001062621,0.0001317031,0.00008340956,0.0001188218,0.00004910427,0.00006106443,0.00002656004,0.0001505067,0.00008140041],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007750206,"about_ca_system_score_gemma":0.00001396225,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006041763,"about_ca_topic_score_gemma":6.614027e-7,"domain_scores_codex":[0.9992423,0.000003500047,0.00019622,0.00008632908,0.0001370821,0.0003345824],"domain_scores_gemma":[0.9994974,0.00007684741,0.00002929019,0.0002647448,0.00001869166,0.0001130648],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001573978,0.0009660972,0.002952047,0.0007147282,0.0008826192,0.000007913614,0.00145145,0.01159598,0.4909808,0.4066935,0.003557109,0.0800403],"study_design_scores_gemma":[0.0003905615,0.0002479744,0.007952249,0.0000832737,0.00007870464,0.00000787945,0.00008679569,0.02373334,0.9608771,0.001292064,0.00462809,0.0006219335],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.72192,0.0001917083,0.0006689929,0.000003632636,0.00006885672,0.0002394364,0.00001146979,0.0002924781,0.2766034],"genre_scores_gemma":[0.9941174,0.0001456067,0.005535935,0.00003044172,0.00007200777,0.00003266306,0.00000588535,0.00003536349,0.00002473522],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4698963,"threshold_uncertainty_score":0.5370694,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01155849340664102,"score_gpt":0.2525114909403027,"score_spread":0.2409529975336616,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}