{"id":"W2085296895","doi":"10.1364/ao.51.007089","title":"Impact of LOCOS techniques on photonic wire waveguides","year":2012,"lang":"en","type":"article","venue":"Applied Optics","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs","keywords":"Bend radius; Materials science; LOCOS; Silicon nitride; Optics; Fabrication; Stack (abstract data type); Photonics; Optoelectronics; Masking (illustration); Silicon; Bending; Waveguide; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0009339725,0.0006154146,0.0002587553,0.0002812071,0.0002702724,0.0005084753,0.0003617606,0.0004037955,0.0007898144],"category_scores_gemma":[0.001931821,0.000360352,0.0002666367,0.0002058941,0.0004195785,0.000725418,0.0006016011,0.000430702,0.0002824207],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002303646,"about_ca_system_score_gemma":0.000219927,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002971202,"about_ca_topic_score_gemma":0.0006755315,"domain_scores_codex":[0.9992411,0.0001414532,0.00008029341,0.000126792,0.0002923831,0.0001179603],"domain_scores_gemma":[0.9973773,0.001176352,0.0008038142,0.0003179713,0.0002791119,0.00004543541],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001263543,0.00003617913,0.001379403,0.000256217,0.00001806444,0.0001962235,0.0001020418,0.001268448,0.986405,0.0008164005,0.00007755497,0.009317987],"study_design_scores_gemma":[0.00001205866,0.0004608944,0.001737652,0.00002578342,0.00002874144,0.0003110103,0.00007731615,0.002549478,0.9929449,0.0001366462,0.001703875,0.00001155047],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9600313,0.001627135,0.03576345,0.0001491367,0.00009262849,0.00004665691,0.00007574147,0.0002725082,0.001941419],"genre_scores_gemma":[0.9621468,0.0009395789,0.0353828,0.00007242716,0.00002840749,0.00005314041,0.0001035198,0.0000909817,0.00118228],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009339725,"threshold_uncertainty_score":0.004939377,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01155849340664102,"score_gpt":0.2525114909403027,"score_spread":0.2409529975336616,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}