{"id":"W2085549178","doi":"10.1116/1.4913877","title":"Promising method toward realization of ultra-low-cost silicon microrod array with nanotip","year":2015,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"Natural Sciences and Engineering Research Council of Canada; Concordia University","keywords":"Silicon; Etching (microfabrication); Anodizing; Substrate (aquarium); Materials science; Nanotechnology; Optoelectronics; Anode; Fabrication; Pyramid (geometry); Optics; Electrode; Chemistry; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002050732,0.0004862621,0.0003586829,0.0002981844,0.0002147982,0.0003410584,0.0008443036,0.000504447,0.001028615],"category_scores_gemma":[0.0001633331,0.0002958065,0.0002849374,0.0002144702,0.0002040327,0.0005734761,0.0005149266,0.0006008272,0.0006077399],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002959419,"about_ca_system_score_gemma":0.0003235053,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002402831,"about_ca_topic_score_gemma":0.0005594149,"domain_scores_codex":[0.9997409,0.00001969658,0.00001518453,0.00006986653,0.0001264057,0.0000279518],"domain_scores_gemma":[0.9998878,0.00002114723,0.00002183927,0.00001807396,0.00003631992,0.00001471527],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001599777,0.0000182571,0.0001203244,0.0001314133,0.000009020707,0.0000829588,0.00002214078,0.0001861564,0.9878851,0.001300066,0.0002533548,0.009975252],"study_design_scores_gemma":[0.00001490121,0.0002274797,0.00050709,0.000007720251,0.00001561642,0.0006672795,0.00002209339,0.00706756,0.9814527,0.0004588481,0.009536162,0.00002254389],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3063794,0.008748566,0.6704657,0.0008933251,0.0005013179,0.0003188835,0.0005557711,0.001412523,0.01072452],"genre_scores_gemma":[0.3999991,0.002438725,0.591776,0.0002029032,0.00008630577,0.0002268299,0.0003347449,0.00006423028,0.004871205],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001028615,"threshold_uncertainty_score":0.003441095,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01813023488904824,"score_gpt":0.2398501610333323,"score_spread":0.2217199261442841,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}