{"id":"W2085698730","doi":"10.1021/cm802195b","title":"Atomic Layer Deposition of Aluminum Oxide Thin Films from a Heteroleptic, Amidinate-Containing Precursor","year":2008,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":35,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"","keywords":"Atomic layer deposition; Aluminum oxide; Context (archaeology); Aluminium; Oxide; Deposition (geology); Layer (electronics); Materials science; Thin film; Inorganic chemistry; Chemical engineering; Chemistry; Nanotechnology; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001019091,0.0001938818,0.0004693671,0.00002098209,0.00002593195,0.00002000863,0.0001807775,0.0001583916,0.0008426245],"category_scores_gemma":[0.00002492019,0.0001962238,0.00006171339,0.00003560484,0.00006355537,0.0001262642,0.0000399979,0.0000447351,0.00001810747],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002402102,"about_ca_system_score_gemma":0.00001705766,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001446218,"about_ca_topic_score_gemma":8.156765e-7,"domain_scores_codex":[0.9989447,0.00002055356,0.0005281884,0.0001829314,0.0001342539,0.0001893904],"domain_scores_gemma":[0.9994272,0.00004452876,0.0001772325,0.0002566434,0.00004293287,0.00005147285],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006535264,0.00001876411,0.0002192242,0.0004581802,0.0000606935,0.000006736476,0.0003353661,0.0001570033,0.9984125,0.000001442595,0.000257545,0.000007151463],"study_design_scores_gemma":[0.0003864946,0.00001583983,0.001227873,0.0001959012,0.00002904845,0.00001920128,0.00009500798,0.0001297115,0.9976294,0.0000608499,0.00003025956,0.0001804315],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9984136,0.0003188986,0.00001511531,0.000002899841,0.000327333,0.00009336798,0.0002461469,0.0001224933,0.0004601982],"genre_scores_gemma":[0.9986767,0.00006318722,0.0009298695,0.000009916031,0.0001047033,0.00001766615,0.0001203592,0.00003752728,0.00004010813],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001008649,"threshold_uncertainty_score":0.9226148,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01598646343056483,"score_gpt":0.2110431375666164,"score_spread":0.1950566741360516,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}