{"id":"W2086178432","doi":"10.1117/12.472317","title":"Direct photopatterning of metal oxide materials using photosensitive organometallic precursor films","year":2002,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Simon Fraser University","keywords":"Materials science; X-ray photoelectron spectroscopy; Thin film; Titanium; Substrate (aquarium); Silicon; Oxide; Chemical engineering; Photoresist; Ultraviolet; Optoelectronics; Nanotechnology; Layer (electronics); Metallurgy","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006612884,0.0002861966,0.0001593924,0.000199403,0.0001084349,0.0002538222,0.0003512087,0.0001754199,0.0009145501],"category_scores_gemma":[0.0002027833,0.0002678189,0.0001596059,0.0001283226,0.0001588312,0.0001794587,0.0001574941,0.0002768164,0.0002270674],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001599545,"about_ca_system_score_gemma":0.0001118219,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002621353,"about_ca_topic_score_gemma":0.0008219081,"domain_scores_codex":[0.9999241,0.000004912705,0.000005193088,0.00002492685,0.00002784365,0.00001295716],"domain_scores_gemma":[0.9998727,0.00004251408,0.00003852184,0.00001635045,0.00001798666,0.00001193013],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006309228,0.000001857113,0.00003061195,0.00001796297,0.000001218576,0.00002317993,0.000005432,0.00001518983,0.9993148,0.00002100673,0.00000555435,0.0005569611],"study_design_scores_gemma":[0.000002367256,0.00004531822,0.0005490869,0.000001111855,0.000003225774,0.00008523723,0.00000622675,0.0001727211,0.9987184,0.000009750829,0.0004051805,0.00000135019],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9867306,0.001002299,0.009472738,0.00004306211,0.00004500604,0.00005390705,0.0001174792,0.0001674162,0.00236748],"genre_scores_gemma":[0.9745392,0.0008963886,0.0212817,0.00003265175,0.00001201469,0.00003712765,0.0001417548,0.00004089982,0.003018286],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009145501,"threshold_uncertainty_score":0.003059447,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01788606885883699,"score_gpt":0.229960660758303,"score_spread":0.212074591899466,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}