{"id":"W2086431109","doi":"10.1007/s00542-009-0823-4","title":"Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme","year":2009,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal","funders":"Consortium de Recherche et d’innovation en Aérospatiale au Québec","keywords":"Band-pass filter; Capacitive sensing; Resonator; Bandwidth (computing); Materials science; Microelectromechanical systems; Center frequency; Capacitance; Electronic engineering; Optoelectronics; Prototype filter; Surface micromachining; Filter (signal processing); Mechanical filter; Acoustics; Low-pass filter; Electrical engineering; Engineering; Physics; Electrode; Telecommunications","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001602312,0.0004527742,0.0005312487,0.0003669158,0.0002213114,0.00007728934,0.0003216945,0.0006224531,0.000002699867],"category_scores_gemma":[0.0001491356,0.0004080028,0.0001189025,0.0005435698,0.0002448668,0.000268399,0.0001048431,0.0006365628,0.00003267193],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003660038,"about_ca_system_score_gemma":0.00002135591,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003257416,"about_ca_topic_score_gemma":0.0000314091,"domain_scores_codex":[0.998126,0.000008578402,0.000448375,0.0004795968,0.0001988387,0.0007386363],"domain_scores_gemma":[0.9989755,0.00007096223,0.0001073954,0.0006763623,0.0001344012,0.00003544801],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004863291,0.000008470855,0.00001758393,0.00005440562,0.00003544811,0.0001339001,0.0001304955,0.0001120954,0.9798762,0.0006557066,0.000215052,0.01875576],"study_design_scores_gemma":[0.0002563593,0.00006884153,0.00007636235,0.00048938,0.00001720472,0.0002688148,0.004415683,0.002021521,0.9858884,0.004598028,0.001336337,0.000563023],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9672741,0.002684711,0.01696104,0.000288886,0.0003256348,0.0004301446,0.00008166843,0.0110059,0.0009479587],"genre_scores_gemma":[0.9428031,0.0002814186,0.0567291,0.00003012274,0.00004285865,0.000007109593,0.000006883093,0.00005168156,0.00004765584],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03976806,"threshold_uncertainty_score":0.9998372,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01462178768350307,"score_gpt":0.2230744812966295,"score_spread":0.2084526936131264,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}