{"id":"W2086679899","doi":"10.1021/cm101442e","title":"Investigation of AlMe<sub>3</sub>, BEt<sub>3</sub>, and ZnEt<sub>2</sub>as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD","year":2010,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":73,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Reagent; Copper; Metal; Toluene; Chemistry; Zinc; Ruthenium; X-ray photoelectron spectroscopy; Isopropyl; Inorganic chemistry; Materials science; Nuclear chemistry; Catalysis; Organic chemistry; Chemical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005451962,0.0006128661,0.001053443,0.00008348896,0.0001053248,0.0001707586,0.0003479951,0.0007046685,0.0001419861],"category_scores_gemma":[0.0001969445,0.0006155731,0.0001596162,0.0001349604,0.0003003874,0.0003750255,0.00009939769,0.0002171348,0.00003218529],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003942366,"about_ca_system_score_gemma":0.0000851259,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000134834,"about_ca_topic_score_gemma":0.000004908395,"domain_scores_codex":[0.9973672,0.00005059071,0.001094164,0.0005856099,0.0003740884,0.0005283409],"domain_scores_gemma":[0.9983297,0.0001256567,0.0004481053,0.0005819465,0.0002383481,0.0002762236],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001069362,0.00003689889,0.00009090384,0.003229541,0.0001829797,0.000004772106,0.0002012439,0.00003499169,0.994046,0.000008746228,0.001932597,0.0001244373],"study_design_scores_gemma":[0.001127729,0.00005045023,0.0006620158,0.0003046381,0.0001620985,0.00004266428,0.00007389252,0.00002538705,0.9965857,0.0002192625,0.0001566713,0.0005894864],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9960236,0.0003251709,0.000001900424,0.00003066174,0.001496367,0.0005729211,0.001255603,0.0001764365,0.0001173392],"genre_scores_gemma":[0.9975746,0.0002287279,0.0001106997,0.00007011471,0.0007363973,0.0001138001,0.001018029,0.0001383074,0.000009331014],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002924903,"threshold_uncertainty_score":0.9996296,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009558581249304221,"score_gpt":0.2157566384286523,"score_spread":0.206198057179348,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}