{"id":"W2086679899","doi":"10.1021/cm101442e","title":"Investigation of AlMe<sub>3</sub>, BEt<sub>3</sub>, and ZnEt<sub>2</sub>as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD","year":2010,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":73,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Reagent; Copper; Metal; Toluene; Chemistry; Zinc; Ruthenium; X-ray photoelectron spectroscopy; Isopropyl; Inorganic chemistry; Materials science; Nuclear chemistry; Catalysis; Organic chemistry; Chemical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002653927,0.0003509819,0.0003522955,0.0001786949,0.0001755535,0.0002926811,0.0004056898,0.0003006597,0.000464522],"category_scores_gemma":[0.000421131,0.0002365159,0.0001584004,0.0002109452,0.0001681673,0.0002714715,0.0001903944,0.0002605382,0.0001794859],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002709874,"about_ca_system_score_gemma":0.0001782734,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000754653,"about_ca_topic_score_gemma":0.001880804,"domain_scores_codex":[0.9997534,0.00003738688,0.00001560687,0.00004541887,0.0001138481,0.00003434522],"domain_scores_gemma":[0.9997988,0.00005964766,0.0000529369,0.00001508118,0.00005603272,0.00001755247],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007234042,0.00001112158,0.0001959791,0.00008126342,0.000009715283,0.00005486945,0.00001292711,0.00007902851,0.9982666,0.00003066161,0.00001570993,0.001169775],"study_design_scores_gemma":[0.00000480539,0.00008797221,0.000692383,0.000001952175,0.0000104802,0.00007307195,0.00000748181,0.0006827752,0.9980012,0.000004720658,0.0004312668,0.000001876973],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9939545,0.001263655,0.003454487,0.00002985226,0.00001359134,0.00003837118,0.0000912229,0.00008208022,0.001072314],"genre_scores_gemma":[0.9931009,0.0005791399,0.005212376,0.00002292885,0.000005382503,0.00002397553,0.00008327037,0.00002589902,0.0009461392],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000754653,"threshold_uncertainty_score":0.001966178,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009558581249304221,"score_gpt":0.2157566384286523,"score_spread":0.206198057179348,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}