{"id":"W2086890161","doi":"10.1116/1.3268131","title":"Interdependence of optimum exposure dose regimes and the kinetics of resist dissolution for electron beam nanolithography of polymethylmethacrylate","year":2010,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"Applied Nanotools (Canada); National Institute for Nanotechnology; University of Alberta","funders":"","keywords":"Nanolithography; Resist; Dissolution; Electron-beam lithography; Lithography; Materials science; Cathode ray; Nanotechnology; Kinetics; Nanostructure; Diffusion; Kinetic energy; Electron; Chemical engineering; Chemical physics; Optoelectronics; Chemistry; Fabrication; Thermodynamics; Physical chemistry; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004259581,0.0002875392,0.0002913781,0.0002069165,0.0001710397,0.0003342094,0.0002221506,0.0002630253,0.0007317021],"category_scores_gemma":[0.001236135,0.000300433,0.0001660106,0.0001545187,0.0003632506,0.0004762221,0.0002704663,0.000377065,0.0001869716],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002341881,"about_ca_system_score_gemma":0.0001359663,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001513774,"about_ca_topic_score_gemma":0.0002932459,"domain_scores_codex":[0.9996578,0.00005483923,0.00003966856,0.00009952856,0.0001018694,0.00004634046],"domain_scores_gemma":[0.9988869,0.0005997594,0.0002830555,0.0001073007,0.00009152236,0.00003140194],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007129862,0.00001420777,0.0003731926,0.00004302915,0.000003523519,0.00002522492,0.00003234027,0.0001378358,0.9977301,0.00003724836,0.000006379752,0.001525714],"study_design_scores_gemma":[0.000002935727,0.00006544028,0.001532348,0.000001874171,0.000003649263,0.00003074768,0.000008562974,0.000306717,0.9978759,0.00001460936,0.0001549169,0.000002143117],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9902029,0.001059093,0.00788847,0.00004297753,0.000007800165,0.00004536566,0.0001087555,0.00005665762,0.00058802],"genre_scores_gemma":[0.9928135,0.0005353485,0.006142664,0.00001862369,0.000005086184,0.00004613533,0.00006835705,0.00003560197,0.0003346898],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007317021,"threshold_uncertainty_score":0.002447784,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006208226722484741,"score_gpt":0.2328754827838092,"score_spread":0.2266672560613245,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}