{"id":"W2087497801","doi":"10.1063/1.1487914","title":"Exposure characteristics of cobalt fluoride (CoF2) self-developing electron-beam resist on sub-100 nm scale","year":2002,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Electron and X-Ray Spectroscopy Techniques","field":"Materials Science","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Cobalt; Resist; Fluorine; Materials science; Transmission electron microscopy; Electron beam processing; Electron energy loss spectroscopy; Electron beam-induced deposition; Irradiation; Cathode ray; Scanning transmission electron microscopy; High-resolution transmission electron microscopy; Nanoparticle; Spectroscopy; Analytical Chemistry (journal); Electron; Chemistry; Nanotechnology; Metallurgy; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004405981,0.0002714124,0.000624189,0.00009906076,0.0001327968,0.00006872995,0.0004643909,0.0001152801,0.00005743655],"category_scores_gemma":[0.00001485896,0.0002420826,0.000147351,0.0003050622,0.00008529872,0.0001620966,0.00004470164,0.0004548479,0.00004106904],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002488912,"about_ca_system_score_gemma":0.0001344437,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003110874,"about_ca_topic_score_gemma":0.000001799065,"domain_scores_codex":[0.9978414,0.00003947168,0.0007841837,0.0002426903,0.0006175255,0.0004747252],"domain_scores_gemma":[0.9982457,0.0000887763,0.0009870901,0.0003239014,0.0002395076,0.0001150449],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000201804,0.0003128292,0.00009964324,0.00005725399,0.00003138243,0.000006219271,0.0002936679,0.00003209033,0.9887453,0.006774043,0.002644527,0.000801262],"study_design_scores_gemma":[0.0004005269,0.0007232037,0.0008588245,0.00009849066,0.00005016612,0.00001219998,0.00002103145,0.00005366949,0.9927644,0.003271154,0.001500997,0.0002453518],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9943465,0.00009412597,0.001209127,0.0001043395,0.0001998714,0.000188878,0.00001241914,0.00009931054,0.003745448],"genre_scores_gemma":[0.9909112,0.000445147,0.007607348,0.0002740753,0.0006601872,0.000007857197,0.000003254761,0.00004289866,0.00004801133],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006398221,"threshold_uncertainty_score":0.9871842,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01145736655512787,"score_gpt":0.243535722056136,"score_spread":0.2320783555010081,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}