{"id":"W2087707823","doi":"10.1109/vtsa.2007.378905","title":"A 50nm high-k poly silicon gate stack with a buried SiGe channel","year":2007,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Materials science; Optoelectronics; Silicon; Channel (broadcasting); Transistor; Electron mobility; Stack (abstract data type); Silicon-germanium; Substrate (aquarium); Stress (linguistics); Electrical engineering; Computer science; Engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001194146,0.0001608076,0.0001735997,0.00006510187,0.00002788929,0.0000534387,0.00009145992,0.00006530616,0.0004509624],"category_scores_gemma":[0.000003593226,0.000119648,0.00002150933,0.000112712,0.00001926746,0.0001371575,0.00001527578,0.00005825068,0.0001047682],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002382592,"about_ca_system_score_gemma":0.000007774195,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00034085,"about_ca_topic_score_gemma":0.0001540341,"domain_scores_codex":[0.9992293,0.000005241764,0.0001711675,0.0001503364,0.0001178436,0.000326188],"domain_scores_gemma":[0.9996423,0.00002803077,0.00002140361,0.0001849945,0.00002459941,0.00009873332],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001359078,0.00004276046,0.0003013329,0.0001784217,0.0001230607,0.00006428016,0.0008777219,0.000870525,0.992661,0.002497213,0.001515027,0.000732723],"study_design_scores_gemma":[0.0008786974,0.0001344546,0.005361235,0.0000449975,0.00002248515,0.00001785422,0.0004592522,0.001522929,0.985875,0.0002292911,0.004980753,0.0004731208],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9896483,0.0002941396,0.0009405721,0.00003170429,0.000353419,0.0001150002,0.00000812564,0.0005388155,0.008069945],"genre_scores_gemma":[0.9988056,0.00001225807,0.0003439731,0.0001570533,0.0002480716,0.000005880817,0.000008602023,0.00004073685,0.0003777705],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.009157375,"threshold_uncertainty_score":0.4937722,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008451597203735922,"score_gpt":0.1969440953885028,"score_spread":0.1884924981847668,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}