{"id":"W2088070896","doi":"10.1063/1.2361182","title":"Ion cutting and transfer of sub-100-nm silicon layers using low-keV H, D, and He ions","year":2006,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Ion; Materials science; Silicon; Wafer; Fluence; Ion implantation; Range (aeronautics); Surface roughness; Surface finish; Analytical Chemistry (journal); Atomic physics; Optoelectronics; Chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004308236,0.000139226,0.0001798529,0.00002998746,0.00004486186,0.00003386543,0.0000402027,0.00004199296,0.0000032522],"category_scores_gemma":[4.388195e-7,0.0001448645,0.00002454599,0.00007626542,0.0000540678,0.00008804737,0.00001186454,0.00006495831,0.000001134471],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001267783,"about_ca_system_score_gemma":0.000002865607,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001218536,"about_ca_topic_score_gemma":0.000003183092,"domain_scores_codex":[0.999438,0.000006780803,0.0001643275,0.0001460995,0.00007790629,0.000166924],"domain_scores_gemma":[0.9998125,0.00003398005,0.00002063962,0.00009750138,0.000007048848,0.00002835286],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000003857482,0.00000744067,0.000340756,0.0001358247,0.00001934882,5.810718e-7,0.0001896055,0.009184065,0.9890656,0.0006503638,0.00004943581,0.0003530636],"study_design_scores_gemma":[0.000308338,0.000003577265,0.0008787464,0.00003485266,0.00003637795,0.000001722721,0.00006591398,0.001444996,0.996816,0.000169535,0.00005877228,0.0001811551],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9984234,0.0001013419,0.0009237669,0.00002826422,0.000100948,0.0001111489,0.00001141825,0.00006495658,0.0002347654],"genre_scores_gemma":[0.9994289,0.00001517506,0.0001871347,0.0001280458,0.0001934907,0.000005242021,0.00001092433,0.0000305662,4.770197e-7],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.007750356,"threshold_uncertainty_score":0.5907404,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009506234599128718,"score_gpt":0.1912776874103395,"score_spread":0.1817714528112108,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}