{"id":"W2088070896","doi":"10.1063/1.2361182","title":"Ion cutting and transfer of sub-100-nm silicon layers using low-keV H, D, and He ions","year":2006,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Ion; Materials science; Silicon; Wafer; Fluence; Ion implantation; Range (aeronautics); Surface roughness; Surface finish; Analytical Chemistry (journal); Atomic physics; Optoelectronics; Chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002097397,0.0004395039,0.0003365099,0.0002151255,0.0003020485,0.0003791575,0.000425303,0.0005509468,0.001638489],"category_scores_gemma":[0.0002975809,0.0003468642,0.0003804463,0.0001384608,0.0003580404,0.0004343812,0.0004107131,0.0003369438,0.0003332864],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002478541,"about_ca_system_score_gemma":0.0001799796,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006154507,"about_ca_topic_score_gemma":0.0009727844,"domain_scores_codex":[0.9998566,0.000009427201,0.000008377445,0.00003055876,0.00004657077,0.00004841888],"domain_scores_gemma":[0.9997979,0.00007342465,0.00004248123,0.00003464064,0.00003175035,0.00001989224],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005204896,0.00001511854,0.0002062182,0.00004508158,0.00001275758,0.00005472086,0.000065119,0.000233722,0.9975382,0.00007392071,0.00002514661,0.001678003],"study_design_scores_gemma":[0.00001205219,0.0001405853,0.0009086439,0.000002242542,0.00001127036,0.00005523063,0.00003132702,0.0006859694,0.9976448,0.000025032,0.0004779469,0.000004899156],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.995427,0.0004142973,0.002987663,0.00003404645,0.00001650047,0.0000238216,0.00003817832,0.00005089736,0.00100761],"genre_scores_gemma":[0.9876148,0.0003365107,0.009638137,0.00004629942,0.000007450673,0.00001781106,0.00009901155,0.00004240376,0.002197684],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001638489,"threshold_uncertainty_score":0.005481362,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009506234599128718,"score_gpt":0.1912776874103395,"score_spread":0.1817714528112108,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}