{"id":"W2088365114","doi":"10.1117/12.898905","title":"Improving the accuracy of the bimetallic grayscale photomasks using a feedback controlled flat-top beam","year":2011,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Grayscale; Photomask; Materials science; Optics; Laser; Optoelectronics; Raster scan; Indium tin oxide; Computer science; Thin film; Resist; Pixel; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000278203,0.0004411574,0.0001588742,0.000321367,0.0001744089,0.0004444676,0.0006550243,0.0003586164,0.002772298],"category_scores_gemma":[0.001397736,0.0002752384,0.000120906,0.0001874407,0.0002168137,0.0004613391,0.0003934359,0.0003845458,0.0004835996],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005907548,"about_ca_system_score_gemma":0.0003644968,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001965831,"about_ca_topic_score_gemma":0.002464914,"domain_scores_codex":[0.9996252,0.00002001654,0.00002391963,0.00009981456,0.0001913611,0.00003955281],"domain_scores_gemma":[0.9991766,0.0001966175,0.0001389666,0.0001650417,0.0002827347,0.00003993171],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004650358,0.00002283033,0.000381828,0.00002752598,0.000002659475,0.00004526618,0.00004749428,0.0006377531,0.9859787,0.0001581883,0.0001617311,0.01248936],"study_design_scores_gemma":[0.000006928586,0.00009084835,0.002025059,0.000004140721,0.000005682058,0.00007552466,0.00001644947,0.008266845,0.9883454,0.00003390219,0.001117801,0.00001139774],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9208076,0.0003198468,0.07172439,0.0002234995,0.0001922102,0.00006923726,0.0002233581,0.002598305,0.003841593],"genre_scores_gemma":[0.9217439,0.0001112551,0.0737019,0.00005817913,0.00001339819,0.00003332386,0.0001029369,0.0001369403,0.004098087],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002772298,"threshold_uncertainty_score":0.009274244,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01485383413821471,"score_gpt":0.2321747052312044,"score_spread":0.2173208710929897,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}