{"id":"W2089328236","doi":"10.7567/jjap.52.086501","title":"Stochastic Effect on Contact Hole Imaging of Chemically Amplified Extreme Ultraviolet Resists","year":2013,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Western Canada Research Grid; National Institutes of Health; National Science Foundation","keywords":"Extreme ultraviolet lithography; Resist; Extreme ultraviolet; Critical dimension; Lithography; Realization (probability); Materials science; RADIUS; Monte Carlo method; Surface finish; Contact angle; Optics; Ultraviolet; Enhanced Data Rates for GSM Evolution; Nanotechnology; Analytical Chemistry (journal); Chemistry; Chemical physics; Optoelectronics; Physics; Composite material; Chromatography; Mathematics","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001837747,0.000230771,0.0004231127,0.0001017406,0.00003128802,0.00002229987,0.0002832677,0.00004326822,0.00001960771],"category_scores_gemma":[0.00001987433,0.0001947307,0.0001469352,0.0002144232,0.00006461208,0.0001823514,0.0000203694,0.0003182891,0.00000804133],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006088605,"about_ca_system_score_gemma":0.000008776075,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003537692,"about_ca_topic_score_gemma":6.573791e-8,"domain_scores_codex":[0.9987555,0.00001538684,0.0004958643,0.0001284696,0.0003499966,0.000254773],"domain_scores_gemma":[0.9990158,0.0002220459,0.0002556163,0.0002757403,0.0001262058,0.0001045836],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001384576,0.00007736895,0.0001716353,0.00005998637,0.00006847039,0.000002581251,0.0002662163,0.01038525,0.9824246,0.0006457473,0.0001019907,0.005657731],"study_design_scores_gemma":[0.00126885,0.0002506828,0.003763568,0.0002097098,0.00005604264,0.00001533592,0.000139885,0.002663222,0.9824588,0.008833293,0.00002249023,0.0003180825],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9760058,0.00002091955,0.020229,0.000004709372,0.00007039281,0.0003458125,0.000003456317,0.00009686687,0.00322306],"genre_scores_gemma":[0.9969847,0.000004335399,0.002777702,0.00004116885,0.0001034258,0.00004004815,0.000002568803,0.00004374265,0.000002273876],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02097895,"threshold_uncertainty_score":0.7940887,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007761553169685033,"score_gpt":0.2242178740615426,"score_spread":0.2164563208918576,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}