{"id":"W2089328236","doi":"10.7567/jjap.52.086501","title":"Stochastic Effect on Contact Hole Imaging of Chemically Amplified Extreme Ultraviolet Resists","year":2013,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Western Canada Research Grid; National Institutes of Health; National Science Foundation","keywords":"Extreme ultraviolet lithography; Resist; Extreme ultraviolet; Critical dimension; Lithography; Realization (probability); Materials science; RADIUS; Monte Carlo method; Surface finish; Contact angle; Optics; Ultraviolet; Enhanced Data Rates for GSM Evolution; Nanotechnology; Analytical Chemistry (journal); Chemistry; Chemical physics; Optoelectronics; Physics; Composite material; Chromatography; Mathematics","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000449978,0.0001949482,0.0001920384,0.0002547078,0.0001530832,0.0003247766,0.0003172476,0.000278063,0.0003439426],"category_scores_gemma":[0.001829704,0.0001950635,0.0002066243,0.0001573462,0.0004254504,0.0003665906,0.0003443855,0.0002290904,0.00005430516],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004036928,"about_ca_system_score_gemma":0.0001862263,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004731989,"about_ca_topic_score_gemma":0.0005762791,"domain_scores_codex":[0.9996173,0.00007503462,0.00001169467,0.0000782496,0.0001837068,0.0000338776],"domain_scores_gemma":[0.9989159,0.0006241408,0.0002047682,0.0001060849,0.0001100405,0.00003897384],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0003641233,0.00003515547,0.005763538,0.00007921743,0.00003848281,0.0003853571,0.0001703446,0.02590359,0.9542353,0.00278058,0.00006395834,0.01018036],"study_design_scores_gemma":[0.00002252953,0.0002467157,0.01038159,0.000007947018,0.00003529141,0.0004448972,0.00004092848,0.2706882,0.7169794,0.0007139753,0.0004025215,0.00003589147],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9293787,0.0002352724,0.06930386,0.00003872261,0.000009350839,0.0000133235,0.00002582357,0.000128859,0.00086611],"genre_scores_gemma":[0.9938111,0.00005059665,0.005926833,0.000009662297,0.000002857619,0.000004382503,0.00001357544,0.00001250606,0.0001685844],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0004731989,"threshold_uncertainty_score":0.002928972,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007761553169685033,"score_gpt":0.2242178740615426,"score_spread":0.2164563208918576,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}