{"id":"W2090178022","doi":"10.1063/1.1435072","title":"High-k titanium silicate dielectric thin films grown by pulsed-laser deposition","year":2002,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":51,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Materials science; Titanium; Silicate; Pulsed laser deposition; Thin film; X-ray photoelectron spectroscopy; Analytical Chemistry (journal); Nanocrystalline material; Dielectric; Grain size; Fourier transform infrared spectroscopy; Metallurgy; Optics; Nuclear magnetic resonance; Chemical engineering; Chemistry; Nanotechnology; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009069725,0.0002529011,0.0002486273,0.0001635411,0.0002290697,0.000327235,0.0003467506,0.0002548866,0.0007418734],"category_scores_gemma":[0.000171629,0.0003380669,0.0002162416,0.000166978,0.0002038048,0.0002512095,0.0001855066,0.0003105018,0.0003259519],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000273537,"about_ca_system_score_gemma":0.0002035143,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006297292,"about_ca_topic_score_gemma":0.001370136,"domain_scores_codex":[0.9999179,0.000003724623,0.000005886344,0.00001347346,0.00004463766,0.00001447983],"domain_scores_gemma":[0.9999162,0.00001932081,0.00001925749,0.000009355743,0.00002450477,0.00001122809],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000902184,0.000001767803,0.00006201084,0.00003828857,0.000002911698,0.00004644579,0.000008721031,0.00006023001,0.99936,0.00003734527,0.00002010488,0.0003532143],"study_design_scores_gemma":[0.000006689895,0.00003843195,0.0008164843,0.000003962161,0.000007792853,0.0001671407,0.00001785456,0.0005756368,0.9974692,0.00003316054,0.0008602383,0.000003477858],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9895343,0.001652943,0.00595463,0.00009737488,0.00005370387,0.00002341988,0.0002148794,0.00008982374,0.002378896],"genre_scores_gemma":[0.9834453,0.002093974,0.01179677,0.0000316821,0.00001829105,0.00002038396,0.0002956023,0.00003185583,0.002266004],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007418734,"threshold_uncertainty_score":0.002481818,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007177770803201541,"score_gpt":0.1688838265319599,"score_spread":0.1617060557287584,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}