{"id":"W2090485145","doi":"10.1116/1.1491549","title":"Comparison of two different Ti/Al/Ti/Au ohmic metallization schemes for AlGaN/GaN","year":2002,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences","funders":"","keywords":"Ohmic contact; Materials science; Optoelectronics; Contact resistance; Auger; Wafer; Auger electron spectroscopy; Heterojunction; Passivation; Annealing (glass); Transmission electron microscopy; Layer (electronics); Metallurgy; Composite material; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005989481,0.0002471416,0.0005611641,0.0004849684,0.0003681941,0.0001471865,0.0003629328,0.00005673281,0.00002659227],"category_scores_gemma":[0.00001514839,0.00018183,0.00007797599,0.0004719602,0.000383193,0.0002837256,0.00005735297,0.0001980283,1.080977e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009856556,"about_ca_system_score_gemma":0.0001467764,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000004899734,"about_ca_topic_score_gemma":0.000003426877,"domain_scores_codex":[0.9982315,0.00002253173,0.0006326337,0.0003057304,0.0003510663,0.0004565227],"domain_scores_gemma":[0.9984158,0.0000171577,0.0008609068,0.0001466944,0.0004652008,0.00009421243],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002552098,0.00008885645,0.01022029,0.00007829202,0.00008042464,1.030301e-7,0.0004095927,0.00000498968,0.9403026,0.00257311,0.0000144972,0.04620171],"study_design_scores_gemma":[0.001703207,0.0008828301,0.0007678781,0.000127202,0.0002338594,0.00001309284,0.0003924356,0.0008795289,0.9725101,0.01997058,0.002202311,0.0003169827],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9842926,0.008181437,0.006835314,0.0002651743,0.0001561826,0.0002193321,0.000008398523,0.00001088388,0.00003070549],"genre_scores_gemma":[0.9983146,0.00008160401,0.001452706,0.00003155212,0.00008599033,0.000007688333,0.000002289798,0.00001546663,0.000008054958],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04588473,"threshold_uncertainty_score":0.7414812,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03527070660078389,"score_gpt":0.2969512237820312,"score_spread":0.2616805171812473,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}