{"id":"W2090735812","doi":"10.1063/1.3289732","title":"Structural analysis of silicon carbon nitride films prepared by vapor transport-chemical vapor deposition","year":2010,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":33,"is_retracted":false,"has_abstract":true,"ca_institutions":"Bishop's University; Institut National de la Recherche Scientifique; Université de Sherbrooke","funders":"","keywords":"X-ray photoelectron spectroscopy; Fourier transform infrared spectroscopy; Chemical vapor deposition; Analytical Chemistry (journal); Amorphous solid; Carbon nitride; Silicon; Chemical bond; Materials science; Infrared spectroscopy; Silicon nitride; Carbon fibers; Amorphous carbon; Chemistry; Chemical engineering; Crystallography; Nanotechnology; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009237989,0.0002217077,0.0001663605,0.0002899767,0.0002130283,0.0001556175,0.0001805461,0.0002326261,0.001222991],"category_scores_gemma":[0.0001397828,0.0001663883,0.0001294602,0.000244867,0.000129054,0.0001187144,0.0000688021,0.000246139,0.0001480292],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002026939,"about_ca_system_score_gemma":0.000177495,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001263435,"about_ca_topic_score_gemma":0.002817654,"domain_scores_codex":[0.9999313,0.000003540675,0.00000373203,0.00001660184,0.00003305558,0.00001184451],"domain_scores_gemma":[0.9998999,0.00002056373,0.00001484249,0.000008065415,0.00003921179,0.00001734013],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001229913,0.00000445309,0.00008844941,0.00001821891,0.00000168449,0.00001798608,0.000004209544,0.0000278164,0.9993712,0.00001656069,0.00001435719,0.0004228154],"study_design_scores_gemma":[0.000005104104,0.0000667,0.006289401,0.000003413686,0.000006053504,0.00005591071,0.00001392786,0.0005760601,0.9922968,0.00001252182,0.0006717183,0.000002451974],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9930364,0.0009161982,0.001898627,0.00004573771,0.00003284125,0.00002926024,0.0006763338,0.000043982,0.003320518],"genre_scores_gemma":[0.9917457,0.0007210025,0.004129157,0.0000300104,0.000009658764,0.00002765416,0.001112034,0.00002464251,0.002200148],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001263435,"threshold_uncertainty_score":0.004091322,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007514903964085458,"score_gpt":0.2446316684185948,"score_spread":0.2371167644545094,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}