{"id":"W2091910382","doi":"10.1109/jmems.2012.2194776","title":"A Rapid Hot-Embossing Prototyping Approach Using SU-8 Molds Coated With Metal and Antistick Coatings","year":2012,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"","keywords":"Embossing; Materials science; Lithography; Layer (electronics); Mold; Electroplating; Wafer; Rapid prototyping; Nanoimprint lithography; Photoresist; Fabrication; Nanotechnology; Composite material; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001082987,0.0002164581,0.0004991116,0.0002645515,0.00009390731,0.0001330871,0.0001402222,0.0001296645,0.000004939257],"category_scores_gemma":[0.00002755528,0.0001674976,0.00009255826,0.0004551865,0.00003967839,0.0003334818,0.00001772471,0.0003693192,5.383053e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001035386,"about_ca_system_score_gemma":0.00002810595,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001829482,"about_ca_topic_score_gemma":1.752175e-7,"domain_scores_codex":[0.9984404,0.0001399936,0.0006022147,0.0001259619,0.0002589576,0.0004324995],"domain_scores_gemma":[0.9991486,0.00005620698,0.0003158578,0.0001254115,0.0001455253,0.000208383],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005592779,0.00007920284,0.0003123005,0.0002584603,0.0001703399,0.000006098153,0.0001709866,0.00003291357,0.994736,0.001361248,0.00006990074,0.002746637],"study_design_scores_gemma":[0.00468322,0.002937381,0.001598011,0.002541932,0.00122517,0.03148397,0.001463048,0.1356547,0.7926978,0.0001400907,0.02306682,0.002507803],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.568817,0.007430248,0.4226434,0.000008446701,0.0001530523,0.0005590498,0.00000367224,0.0001582635,0.00022692],"genre_scores_gemma":[0.9744101,0.0001307374,0.02519335,0.00001227674,0.000184093,0.00001466691,0.000001536076,0.00004803502,0.000005195023],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4055931,"threshold_uncertainty_score":0.6830356,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01782819679801993,"score_gpt":0.2273451490716655,"score_spread":0.2095169522736456,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}